16 C 21.125699084817573 21.217347443498184 20.871740209903027 Si 22.026181752613013 22.516834278859026 22.770934568957934 C 23.816305058426039 20.990585826973650 20.935604196219032 C 25.156522232672348 22.139332510395263 22.462129225719302 C 20.950990138013914 23.704880823569326 21.047310077522045 C 22.599098973682032 25.275614203449447 22.306773860596028 C 23.904013927458450 23.843238879768315 20.811344385432228 Si 25.571068550296861 25.019201806662526 22.180538038447065 Si 21.248121158367400 21.163118686011401 24.241402490459109 Si 22.736721531665868 22.747410673803337 25.474704236455420 C 23.589629027617782 21.554440760399196 24.014611133314943 Si 25.358440454908244 22.692911022366978 25.228170435361747 C 21.114125358403246 24.121725124201884 23.637180664449069 Si 22.873308070073811 25.603600692906916 25.110071982596882 Si 23.935851308497497 23.732534524081597 24.028265645642175 Si 25.231167720773978 25.567992555218169 25.765546638669896