500 Si 0.007055442631995 0.032139095464420 0.031302876087149 C 1.658603547705056 1.659555715993599 0.046295454907225 C 1.608710715992227 0.016588414763098 1.595667552846206 C 0.023101940586197 1.603341655940686 1.614760183629076 C 3.280858566912042 0.008973952273553 0.021095872659699 C 4.927916591679115 1.635609253420623 0.021988075558501 C 4.875722711270249 0.004709176979322 1.664016676546413 Si 3.274568272485983 1.662967885798001 1.644168324353849 C 6.529067042514495 0.006310684045633 0.007183913538452 C 8.190952389354072 1.595707821452504 0.024516725623804 C 8.162326751608502 0.005293858496121 1.673470019969070 Si 6.542980459468359 1.641480613338994 1.616848652910552 Si 9.764468070379204 0.035567970063252 0.004456381869867 C 11.476762680285493 1.636325389073782 0.030743497650314 C 11.428429253848167 0.021195702969086 1.633797737106232 Si 9.792053766624907 1.646052045842752 1.609280293777930 C 13.101566031552197 0.001469366432129 0.015876366925755 Si 14.737874788360140 1.606036349220427 0.015613780432125 Si 14.730285569965849 0.008966554979013 1.598568140264488 Si 13.095361517255695 1.644640135593482 1.619031639825771 C 0.035319388480399 3.272652767391959 0.018001219760892 Si 1.659822706895779 4.915266414924718 0.011844001054987 C 1.651036223852831 3.287362301991255 1.582932913157665 Si 0.020062951099448 4.929102072570601 1.632412444436706 Si 3.246924680245158 3.284104693011176 0.035042262553774 C 4.903522185020614 4.890699173639147 0.037465658509192 C 4.902433364700820 3.260278488281251 1.619830160214436 C 3.250691052505795 4.848142341784548 1.627406808781620 Si 6.532276896785102 3.273108894565361 0.012718488637879 C 8.140142787897407 4.924974436463978 0.012049793971776 C 8.173241642435384 3.266771766012368 1.617499241535688 C 6.530181271563396 4.935668494614881 1.622709537130927 C 9.844686715361007 3.272551337044057 0.017465271858735 C 11.431631792121543 4.916133366251266 0.029807458312871 C 11.492633252064470 3.273263925106212 1.619327396953627 Si 9.822885229104260 4.901275189713888 1.656728086311143 C 13.104378797742372 3.280143955002901 0.004595158069043 Si 14.694371845225618 4.906671212757413 0.010598439991552 C 14.713394788086836 3.322116551116022 1.615722947427006 Si 13.094455467883057 4.887566921745550 1.637587782654165 C 0.008574570671089 6.558702361920701 0.009351464405062 C 1.659678585974547 8.181804820621480 0.006734182725860 C 1.656833217071895 6.530063499560902 1.622106022633066 C 0.014115448106620 8.176658359760015 1.666562307807945 Si 3.323562969210974 6.508369319529849 0.021410982448013 Si 4.934816360475329 8.183751074238124 0.011354227195468 C 4.891414793790478 6.529818409011175 1.629974337594029 C 3.268703475363054 8.207218078089102 1.641854799514438 Si 6.541174640845902 6.522193689714665 0.020550055157566 Si 8.179871092488735 8.163892402277325 0.004283495969854 Si 8.151686762979462 6.557527024498199 1.596522821387249 Si 6.561932023374974 8.170569450167912 1.634285755061889 Si 9.786677285449867 6.505151673189489 0.020398519457055 Si 11.415596099699481 8.118870986710721 0.020890389404226 C 11.451886280219917 6.536134169277460 1.652020700164003 C 9.789645787499174 8.147921043775451 1.647870812868818 Si 13.095946861458996 6.536261799206518 0.010398186747730 C 14.706590250042407 8.176726028238424 0.002297356503973 C 14.734230397217738 6.557294375684815 1.604252448940097 Si 13.047557461237771 8.138761880233940 1.660142052144187 Si 0.029177740298933 9.824111082840556 0.020565728635642 Si 1.648802850658041 11.466597276045857 0.034144599316849 Si 1.644940772543914 9.832398358464610 1.606956529223847 C 0.002640400817765 11.459109280949521 1.619359491354665 C 3.281060403762984 9.819323025677027 0.007978762722317 C 4.889916819643484 11.386126312011591 0.047630773704097 C 4.911675215350307 9.807775413331164 1.634846263323031 C 3.246496844177269 11.433215298970804 1.623710192709866 Si 6.487678088525676 9.836746942772221 0.032680337666445 C 8.189462087937562 11.408306855486327 0.017482625428047 C 8.176069819220046 9.839817018563627 1.615360824864928 Si 6.567800319427427 11.442883671928826 1.598009530689142 Si 9.791172014653183 9.798625008700295 0.004909767540855 Si 11.411839637798661 11.399413940306511 0.005863593460175 C 11.413011392092555 9.797487918676001 1.636636753654185 Si 9.797858083203526 11.413698362973232 1.626995212342780 Si 13.080904915984721 9.804157143511212 0.023107865924813 Si 14.736095014368960 11.445677325860315 0.018890966751765 C 14.665587879867219 9.800501981963123 1.618272920891482 Si 13.105679587930963 11.414668932170136 1.646500873328975 C 0.005023624344888 13.042699085895912 0.021713986654637 C 1.633843095552557 14.728266083325739 0.030072630192433 C 1.645175553874952 13.051471101952727 1.643165812480590 Si 0.010861241323466 14.712188224379229 1.614323045397218 C 3.250545461927401 13.098314993381063 0.024128986801370 C 4.886973606207089 14.719205755514901 0.017144406581119 Si 4.933376258353616 13.042779690070290 1.617789668828208 Si 3.274757846725135 14.662328635868995 1.602166200540367 Si 6.529027147244107 13.047262718014297 0.018204733092617 C 8.121310818830651 14.720814735477694 0.034782558243462 Si 8.179884181816588 13.089577589583724 1.608889814147022 Si 6.481706136747595 14.716804943185506 1.606061049572586 Si 9.825292713161469 13.050495487423719 0.026373026752053 Si 11.438717890523247 14.679722061108503 0.029567602068122 Si 11.425356477263103 13.054465723899678 1.651671194187082 C 9.825688080948749 14.677421671227100 1.653281360570028 Si 13.046906700640966 13.099642962053228 0.022174071234414 Si 14.681778016061889 14.704449431227941 0.036859998872211 C 14.729779087664580 13.039590812431079 1.574978520980718 Si 13.056971023599953 14.684949409795626 1.617739621325593 Si 0.008219913181299 0.005916252710908 3.289251916678857 C 1.644941076408885 1.663533717800217 3.285658699305228 C 1.615677336023854 0.019410142762681 4.911035538205566 Si 0.003993645781030 1.618748098599981 4.846814449340055 C 3.255827882100712 0.008934324956057 3.261786558452638 C 4.905090485820923 1.611284149758839 3.237890091084839 Si 4.877998695082204 0.015887989797783 4.903186313805822 C 3.251478272699385 1.612999437835039 4.876270138350174 Si 6.541075398553266 0.010138683989507 3.294501503788137 C 8.138394667982162 1.665557800661363 3.287410815926549 C 8.169474268644581 0.028543197090739 4.889285792226375 Si 6.533756392493267 1.659083808823764 4.921949584674416 Si 9.812730375354246 0.021347745249932 3.258782640146472 Si 11.464481367705593 1.662067919173926 3.311277471798051 Si 11.445177944094247 0.001045342943133 4.907466923979880 C 9.802767376691333 1.626078851189080 4.922847765670064 C 13.036687590159470 0.053285297061996 3.261980222440206 Si 14.710519850677473 1.615939275003866 3.292842115206302 Si 14.718360552522725 0.025528084958270 4.934290680713803 C 13.075158606612444 1.628455261055490 4.941695330300221 C 0.046038957398098 3.312423367153617 3.292796462280899 C 1.644778093972703 4.926437105350967 3.291168581138509 C 1.595297488875767 3.265209025018895 4.926797282021404 C 0.006078366615513 4.873388895375677 4.897709961065046 C 3.295651515992859 3.262823956366601 3.274688109581804 Si 4.903475536826796 4.915581149647612 3.266684716452617 C 4.873297072007075 3.243799379940213 4.940111688440944 C 3.308914953181995 4.902135803824176 4.909119928357322 C 6.536782731648232 3.276584434788202 3.289176163078466 Si 8.145620760173923 4.932651531873396 3.282127678452646 C 8.180171645046039 3.275367240271049 4.889212147219754 Si 6.518923980854668 4.888201063330814 4.929618644846962 Si 9.773492125831929 3.294390131505580 3.266950769475514 C 11.406214654561861 4.860384251456189 3.293658239565854 Si 11.435909759601214 3.271359109828412 4.876900535707757 Si 9.811227979494657 4.898836322230728 4.915842456244383 Si 13.052704854406578 3.267810660869454 3.253879898155378 C 14.676663152470976 4.926747694737947 3.272551703315963 Si 14.720999132686975 3.239379705092119 4.891326383341720 C 13.062274839848092 4.899307389506938 4.887037443204568 C 0.011711774295049 6.557096718027822 3.244057101097716 Si 1.641727496715525 8.164242059838971 3.311728335315312 Si 1.654904452655995 6.541483592212818 4.899685221263733 C 0.014400261074327 8.142397428537491 4.945229198437604 Si 3.250027252222163 6.505021430240698 3.288074349873231 Si 4.869852188168316 8.141761176060426 3.239045300808765 C 4.859117280288444 6.554441924993984 4.903554649309321 C 3.313147939929263 8.188900610072229 4.924191992066656 C 6.557492922790881 6.528910970210980 3.296088038207968 Si 8.185635360347828 8.197963015268812 3.246528288828713 C 8.159631424295178 6.563783281368111 4.883740890448265 C 6.584949506402126 8.163878012833409 4.883039613511899 Si 9.815385895786802 6.522212496579908 3.278785412126850 Si 11.411803649755589 8.175172227665808 3.249440780056182 C 11.421550976829757 6.555549153793192 4.868309788184146 C 9.831739482587874 8.181185526141235 4.932528811342211 C 13.045789577478830 6.536488752184558 3.263053478437167 C 14.661261023685086 8.195123539121314 3.296879543226719 Si 14.675965727410235 6.509957992646407 4.878834352051938 C 13.088584394248983 8.188730696077103 4.921417922672650 Si 0.022871544072562 9.774465659711298 3.248981768447412 Si 1.612181183120544 11.446257247562714 3.303943117896125 C 1.657905049215936 9.820990249941882 4.888270844703993 C 0.001304369354087 11.409547262173351 4.898607656926739 Si 3.286660603361041 9.834805899793958 3.288837451724397 C 4.921335570872330 11.441025577639527 3.264048829999624 Si 4.931979979087945 9.826387454876643 4.892980675708541 Si 3.250137141696690 11.421786758779906 4.906711382397109 Si 6.522122720304152 9.822362470076587 3.254092150258710 Si 8.202195319632544 11.447225976307109 3.248318625965251 Si 8.187023816268759 9.791599576675893 4.956760431125070 C 6.479682291448321 11.429443449524898 4.872521570227576 Si 9.817557286128601 9.815031826845075 3.258123146945188 Si 11.445408256496501 11.433088469963893 3.250510838944361 C 11.427903252652975 9.849466702386865 4.897519652472913 C 9.800744212137161 11.395847668742388 4.891681613515368 Si 13.077505984323968 9.778945365997922 3.252102043070807 C 14.680766001282800 11.475620267500569 3.294045071280240 Si 14.725339846514133 9.775959480337233 4.907126688415560 C 13.054854346972817 11.438470492275238 4.927183553062470 Si 0.010629588597698 13.052295939409035 3.234399670189076 Si 1.614791881011397 14.696177135196942 3.262287004517944 C 1.603885316935584 13.062181012208738 4.935406057871792 Si 0.025731284654938 14.730409033336610 4.878988435780887 C 3.288052344968930 13.031720914989773 3.296285274694122 C 4.929341479292511 14.666112836370797 3.285823832414291 C 4.863183865608248 13.031812168610754 4.896143641005509 C 3.277681138817151 14.686311954257224 4.883579330179036 Si 6.561360223115106 13.050886440671970 3.286854356872022 C 8.160824884894362 14.707160720598484 3.265461243906576 C 8.143292982976844 13.079353957007632 4.939205878142647 C 6.509437014200838 14.696411850840159 4.910956212429291 C 9.821982252329034 13.116363494371473 3.239280974243691 Si 11.438004289669776 14.714964674256224 3.286224698647217 C 11.453797825297283 13.067611651596140 4.855089714363976 C 9.783059262854325 14.737559529525459 4.848672528774323 Si 13.082761562710987 13.102519226941356 3.308613698374235 C 14.738027159604993 14.710473432623425 3.316679440135609 Si 14.732587255145715 13.044979423328705 4.876810034272214 Si 13.051329611387185 14.684851257335689 4.947413072956224 Si 0.015266520173626 0.011137988756093 6.497937520262065 C 1.647337601293557 1.603532152880259 6.566481812272728 C 1.675761771493508 0.058342918444371 8.126731765960182 Si 0.028352206838165 1.629540578972157 8.143028861873100 C 3.263758488162380 0.064407618188805 6.520259640150035 Si 4.923925618104850 1.609636606912440 6.585025400809301 Si 4.908763795723603 0.049419845701102 8.164983631172419 C 3.298695620066257 1.624629313293351 8.133127370701743 C 6.526839343853296 0.033434372545665 6.537585828692237 Si 8.173014143008356 1.632319881613242 6.568329432739797 C 8.145957764264994 0.028961768379993 8.197590102902979 C 6.510199479027494 1.571636646604164 8.181145036443445 C 9.846853315674430 0.010515261697712 6.577186885636007 C 11.407587043430922 1.644642820631371 6.537948108527523 Si 11.412157366680812 0.016307437652453 8.150876961661316 C 9.760595917884800 1.660739804818717 8.188524428197535 Si 13.087414183680821 0.029323843781920 6.484276437195603 Si 14.679954336987153 1.632109263186685 6.521751649200695 C 14.666929158323864 0.025459343248286 8.219677442381066 Si 13.039978050394497 1.607185661303880 8.149970941600019 C 0.015186543240761 3.241395508846951 6.561726453651329 C 1.667969890176763 4.926452284863928 6.515720759961260 Si 1.628022123929602 3.256355365569639 8.173700206952526 Si 0.029324004386969 4.915844126850245 8.139187554616120 Si 3.273124242259649 3.246000148512592 6.512492645424651 C 4.907509606168555 4.876285008171240 6.569243304418459 Si 4.923540478641518 3.275681870109669 8.158642590748965 C 3.278513972894080 4.942959102959923 8.170787676712091 C 6.526971821046195 3.302993073054452 6.600207598609539 Si 8.161849471714456 4.899750069884461 6.546762858875613 Si 8.157900262731022 3.311030310230748 8.157533513758981 C 6.516985127828360 4.922909415565859 8.170194463400563 C 9.826477502439264 3.293038429340127 6.505199764282559 C 11.402842976207946 4.925159092432983 6.537429583390440 C 11.436519261703042 3.244082665477730 8.149348330139173 C 9.793983928222483 4.914506210092490 8.170934627552080 Si 13.053472997679647 3.236986756127044 6.537764049784012 C 14.687857087220920 4.871578214751383 6.510867263042251 C 14.672641362946461 3.280377547503754 8.182482252782298 Si 13.053078430106757 4.896100513490834 8.182415001973188 C 0.005105659736121 6.581570029765365 6.564168744148152 C 1.618572235383038 8.143910718982491 6.570950154221264 C 1.652606911096254 6.534495824431306 8.154404884624661 Si 0.020733702784709 8.181462780548408 8.158607001952872 Si 3.261409313251963 6.491549232288611 6.555802497948111 C 4.922557174695437 8.136122325549849 6.498570305073774 Si 4.903590445044523 6.526056258560484 8.155447106402146 C 3.240778862057542 8.191631410453738 8.123021834888679 Si 6.553231258766913 6.560735883860747 6.534741352839039 Si 8.180021151964246 8.190194721917155 6.530369445899757 Si 8.163972152187629 6.522197501023919 8.154131871603008 C 6.512438515348020 8.208637705475436 8.204649015122325 Si 9.772918890120005 6.552981009565211 6.518792676218217 C 11.479031857691615 8.158360045236345 6.504767950038718 C 11.403932456569860 6.502016746404804 8.203482294062983 C 9.813499521005788 8.154834076002405 8.150386572045518 C 13.079137257657923 6.509452397508896 6.568166306952435 Si 14.694102884871302 8.187258115408625 6.497783869882981 C 14.704475374530286 6.493104916748703 8.150519324356265 Si 13.044791691332161 8.148144199609783 8.181286483286701 Si 0.002452686259212 9.792656445219809 6.504574825965033 Si 1.652783946363971 11.427276816343774 6.568277798304303 C 1.615783214185532 9.795465262698221 8.192312241136696 Si 0.015714670237102 11.413112867732609 8.184440038920766 Si 3.232693067920853 9.827873169591188 6.550313516540971 C 4.904293652268832 11.428907862949053 6.521163743407878 C 4.946019127325683 9.815704101148247 8.139342245747807 Si 3.296338411025687 11.429666968319472 8.148177038582801 Si 6.559273955971271 9.820040145415541 6.528000741576770 Si 8.188373804326377 11.415083523946359 6.562456599234573 C 8.179013887141744 9.802984335930397 8.182865351518643 Si 6.531078658451004 11.420648739398967 8.138187806291759 C 9.831413985701269 9.829471269019702 6.538001301058830 C 11.438228412942669 11.453215628780955 6.543923922497999 C 11.443633658657754 9.784608577109228 8.169300717387808 Si 9.790228970968727 11.450463570691351 8.201978292451503 Si 13.084712800946138 9.829104696453943 6.515686105018636 C 14.715641667903192 11.402465337144546 6.554034592394997 Si 14.681179833628093 9.825608324444664 8.138628057951401 Si 13.100055087412152 11.410802711698434 8.193861244747854 C 0.010287571706546 13.103768040023978 6.504761500356660 C 1.631047635688639 14.737562588062110 6.545944858875543 Si 1.647509326214371 13.102665531981071 8.194116198291887 C 0.030830177100049 14.726578684005551 8.161757062348151 Si 3.250932195496012 13.045960861670004 6.552609746899901 Si 4.912600036429895 14.735496915805221 6.554899961714825 C 4.927324022715389 13.071903650367343 8.200435785669361 Si 3.302042111699758 14.692149903210526 8.182239951647983 C 6.584979498632020 13.093183511935363 6.538244744748416 C 8.166101283006860 14.720207094720770 6.530129650509295 C 8.211879515924965 13.072102158319867 8.158235879531244 Si 6.550862413483886 14.696370930661432 8.146291332258278 C 9.790335911947876 13.054741083771676 6.561308887679778 Si 11.429901642238173 14.691172354392174 6.523153995307926 C 11.468468637236787 13.041387724596303 8.172141743484842 C 9.847568972119808 14.716270301363046 8.146626044303151 Si 13.093002041921007 13.067560572542652 6.504926064324309 C 14.726607743632888 14.736127711827555 6.554722553296074 Si 14.702039250075684 13.087937165382757 8.200041723631928 Si 13.095153253755173 14.729442971727625 8.150770188831157 C 0.055878404326510 0.032501471988809 9.790848647925168 Si 1.638139934952019 1.658555641020460 9.812396667929164 C 1.684650715482175 0.041100914406391 11.426388329924883 Si 0.013503076908920 1.686973167281508 11.419489662608656 Si 3.253656706266336 0.001526564807807 9.805649200965577 C 4.902157944116061 1.595996076987853 9.831575949425657 C 4.932388966449108 0.004587395155085 11.411828863950140 Si 3.264756994652782 1.664551758150566 11.429359724460392 Si 6.532679826837165 0.015740125467796 9.822467343831875 Si 8.213317055806550 1.640247232074194 9.808746363977912 Si 8.200969348177789 0.021941598502943 11.441265511086650 C 6.524609730790549 1.595529313523435 11.473465826388228 Si 9.854338746986357 0.016910279805935 9.802675461127320 Si 11.429291913922556 1.655155094870490 9.803338242675469 C 11.429424676366388 0.009078987146688 11.461109331313004 Si 9.782486572820044 1.679525145116403 11.472158017634030 Si 13.092489931222177 0.026375949570767 9.783018279049148 Si 14.729384364125714 1.607251155932870 9.829980271817512 Si 14.736283321994817 0.032089724583284 11.462902907195810 C 13.072069677458650 1.626380686107112 11.493513676933302 C 0.032243011646182 3.243550557538331 9.822744136445595 Si 1.626302872133487 4.886731598759428 9.766397977782905 C 1.613233247398422 3.284946334047205 11.464362845506546 Si 0.001126992834595 4.891072259063084 11.464046585983480 Si 3.281732311718399 3.317184323986179 9.842673553169295 Si 4.872163610439938 4.872792892625692 9.834232318676396 Si 4.934098166205439 3.295432915258285 11.398859671411927 C 3.258028663555429 4.891033626080576 11.460879051958475 Si 6.543377009354497 3.293759998677728 9.815742973171369 Si 8.159402002521039 4.902614189710327 9.784329648605414 Si 8.192596868704321 3.276148870299652 11.462242914270563 C 6.502479894928277 4.874881315001367 11.393630194349551 C 9.795816295939757 3.314964451739965 9.825740776080973 Si 11.458337364698947 4.896727676869737 9.781130220155617 C 11.393117164225188 3.256174694065731 11.402960559226736 Si 9.852894023135232 4.900382585065596 11.489648734046819 Si 13.089468535096195 3.265156011298031 9.804527343053016 C 14.724091313212533 4.933228325287201 9.784221999984629 C 14.678501813948323 3.256619926029865 11.438481896318727 Si 13.112773083532151 4.914315394608811 11.435698531091385 Si 0.021554342476162 6.518206841179374 9.820333421673471 Si 1.677933580648865 8.178692331470149 9.786141788480512 Si 1.641095186183857 6.514094124510852 11.427911487251999 C 0.002447718456246 8.169255401010517 11.397345346315221 C 3.288332205252645 6.590390292607792 9.843297288472105 C 4.923389014509977 8.146250223257104 9.838355291521117 C 4.906583143328527 6.562817499776636 11.411971423223889 Si 3.286162046799580 8.198130926530940 11.468851045937839 C 6.536664516184456 6.567195708732688 9.837863741533848 Si 8.195939717237687 8.164305053797053 9.821279591415509 C 8.149437256419343 6.513586049887500 11.448612124957323 Si 6.514474878946376 8.158505719615754 11.438960158348554 C 9.854647823437064 6.545952918148854 9.810272084900003 Si 11.429171549545130 8.196778010966133 9.811699799478712 Si 11.446543861905663 6.565585855489259 11.470184117815446 Si 9.754734073548914 8.140978378294005 11.472036938109563 C 13.103744240871174 6.490125399763967 9.775349698614367 Si 14.723304499114109 8.189724047802491 9.813123533169696 Si 14.736239332641473 6.542513006608863 11.408147831746852 Si 13.036226765791092 8.160470981915688 11.436020455086895 C 0.005207957410651 9.815355555457153 9.805955022414715 C 1.610555477502620 11.491765357029994 9.835176627156487 C 1.668125404318644 9.756572875591365 11.445975044859940 C 0.008577581690820 11.459919209251531 11.408193133584955 Si 3.284324373878990 9.834271625141568 9.816898983713536 Si 4.886283862901755 11.437058754477897 9.809267190902677 C 4.899555527729736 9.800218658374279 11.395359770635158 C 3.254114539129303 11.463868466226716 11.435097825363613 C 6.515876148651171 9.820027378609380 9.758897264941304 Si 8.143746026673307 11.455695810633516 9.835073697760457 Si 8.174655523462892 9.780800826883183 11.405241594519085 C 6.510095034484103 11.421238330095530 11.453215669398174 Si 9.777435193646422 9.775021104127516 9.777013870350993 C 11.409950177824307 11.442499736880663 9.815528040785225 Si 11.437017442819327 9.810557103819255 11.437540963973955 C 9.789999024875575 11.412191738295062 11.471876508858418 C 13.117965339761499 9.780045208782182 9.822286615299303 C 14.712415166625139 11.438671399953858 9.780202835505721 C 14.701998119793114 9.809901549945824 11.465179380762216 Si 13.051896044777632 11.443137926331863 11.433633661646779 C 0.032329812804012 13.048743149402320 9.798316143385122 Si 1.658226899208269 14.737013912413783 9.782468389943549 Si 1.644226487482818 13.056632352451288 11.412501277831886 C 0.024684580361684 14.704057747883725 11.424863135456738 C 3.265535839809582 13.061057898458218 9.804601760562820 Si 4.884814097900083 14.704911653614909 9.816721108413727 Si 4.889733217093965 13.051519709204353 11.455642328340902 C 3.318056884290154 14.732533228280840 11.429018460450200 C 6.499472000951857 13.103286595243654 9.837924554107870 Si 8.173064733631593 14.716055311570141 9.828868528330181 C 8.147477803766231 13.044362287335934 11.409764718628070 C 6.556146959469693 14.699930331226980 11.400016339823420 C 9.744538023529600 13.098633473562041 9.821822471598912 C 11.436033306032055 14.703186501164446 9.821348383332699 Si 11.448907153375693 13.134856311022320 11.426775044338381 Si 9.811287453758194 14.675206318893544 11.376555690698257 C 13.064654096488217 13.105494961475847 9.830908476983769 Si 14.713672380013399 14.684222120969359 9.820340495446816 Si 14.713741636128990 13.097768020198435 11.419173944521432 C 13.040089035821488 14.712491052121496 11.479031721398751 Si 0.013518397645090 0.001441278413020 13.102362523605734 Si 1.625397495026718 1.652498203156620 13.041864810507445 Si 1.657323273015334 0.005730193282146 14.721115326728231 Si 0.029360351208299 1.622250979524526 14.711373872792272 C 3.249816186827568 0.002979976371589 13.031877562642398 C 4.922856027736641 1.670334959884535 13.060908763917899 C 4.874430487745019 0.010749078442530 14.695548400305423 C 3.283571853696291 1.635249024773320 14.664227971364683 C 6.565107579546192 0.019705975831253 13.035509031515888 Si 8.194922908588278 1.659692189338077 13.048244356731367 C 8.191831156225337 0.029831610843616 14.736557788619779 Si 6.517766280276281 1.605680649706696 14.701800033401865 Si 9.804515477778867 0.000547358806666 13.078195310199419 C 11.426901233490046 1.616392451056050 13.052758020065944 Si 11.413412953869431 0.006730188435403 14.729604045110374 C 9.811991794515846 1.680008335400945 14.700208493432342 C 13.073999985410884 0.029351197658389 13.077085440081861 Si 14.692251629459465 1.668255812661751 13.043925299153518 Si 14.730621657326834 0.002945665574202 14.662434595107255 C 13.046320619060790 1.624510676786180 14.697433833217545 Si 0.022610349043527 3.268455846348879 13.102512715467716 Si 1.617417133417872 4.908278727649115 13.035322620999459 Si 1.637553383138850 3.254642907894066 14.699718977213978 Si 0.012107129348983 4.877226884452641 14.735761948781651 Si 3.270571314135357 3.224029935341783 13.106619088550163 Si 4.882702294451029 4.928631182866312 13.079914709559773 Si 4.882368445986535 3.247215487989636 14.723234830974189 C 3.282875634308265 4.899846769633939 14.712016844332052 Si 6.567669677995775 3.295983310439135 13.073802204332255 C 8.156522595498631 4.896437697072721 13.061525702212887 Si 8.173489172908964 3.239681766963865 14.727451216538382 C 6.531584244417562 4.920332215895018 14.734174246210232 Si 9.822867805556989 3.255105256962601 13.046138765610864 C 11.441394913831662 4.899084404191531 13.079596294880639 Si 11.451393653170358 3.282365638947695 14.704400800047898 C 9.838447891222319 4.862466799074185 14.722872148711332 Si 13.106036531380171 3.242559112734651 13.100200936315909 Si 14.736249804467199 4.932801302344539 13.083514646280609 Si 14.725254797425771 3.266484494031949 14.684603600580507 Si 13.081525268320419 4.923779287046016 14.719876327835332 Si 0.004675651256492 6.541247487697958 13.078623522152524 Si 1.636172216019468 8.154936515320987 13.033431510316763 Si 1.639569784234971 6.517730766953532 14.738500446409784 C 0.010310363272157 8.177756293235925 14.692183743075182 Si 3.241839996114083 6.550418203872963 13.094051167200886 Si 4.882736404689590 8.182721634602540 13.073382845270963 Si 4.906652835258849 6.508695441371509 14.739159242764032 Si 3.303255276512237 8.156676701948978 14.694121883781493 Si 6.544519495503568 6.519582531115478 13.079993055588819 Si 8.157325883593005 8.153384811827852 13.074510939474647 C 8.185226732000205 6.518613924557456 14.733613819740221 Si 6.548177768746582 8.163887310921567 14.696245136239686 Si 9.802786547606081 6.531833436273994 13.079380309266810 C 11.450656968220171 8.198576337892305 13.100479480897441 Si 11.438525015454385 6.533405926885828 14.691689699926032 C 9.797979354761949 8.152463596077782 14.710079498677171 C 13.100374690143427 6.526902941266862 13.080573883913834 Si 14.675629874838291 8.173120165216918 13.062515990004757 C 14.692919039573383 6.509129425929194 14.681442013348345 C 13.045415232439295 8.180596531067742 14.719462535919170 Si 0.031576968812070 9.816448954730344 13.071548556411821 Si 1.603207470142595 11.413620063033171 13.104272735141041 C 1.616678160489746 9.852354006255251 14.714720751837863 Si 0.005808954998921 11.420904633152906 14.676440435235596 C 3.212632962606457 9.789786406117685 13.039731106632148 Si 4.857890474349808 11.469144892523140 13.056530050888849 C 4.901196414707015 9.836774164978822 14.734461027295010 Si 3.332389491446461 11.421612868725397 14.704061453642213 Si 6.510328044205099 9.801210237012894 13.085282592997581 C 8.169789348756641 11.431787496734490 13.063142310758161 Si 8.142130471824252 9.822102470424731 14.681343209378150 C 6.534663440767924 11.454665536180697 14.719965485674260 Si 9.801008504501445 9.781053019694845 13.041631638516451 C 11.439006018049113 11.469352545939854 13.051769871537433 Si 11.423785362847800 9.788254456631343 14.684837088796019 C 9.800260594988364 11.407729788200495 14.705137332797102 C 13.062820746971495 9.777820354341650 13.085937199048999 C 14.711217908737956 11.431477360489632 13.068156905163459 Si 14.708174280478721 9.802592222531171 14.701775078876016 Si 13.068650013548977 11.426907949354332 14.736674174706765 C 0.001984302158163 13.063393331318997 13.039545904434279 C 1.617462054259498 14.739703146631999 13.091517650398968 Si 1.650499375251640 13.073570245259194 14.720929549342504 C 0.002853800964924 14.699584111184921 14.720574252383466 C 3.226482041082229 13.046673199442930 13.099149676836014 C 4.940492133170777 14.714056628949237 13.056599818786424 Si 4.904879686635637 13.099513322146318 14.723616644708111 C 3.234764158758236 14.682826956572908 14.692163996406826 C 6.517410805916887 13.061225800820152 13.067128560429296 Si 8.162739673997898 14.700727809046205 13.089837693265618 Si 8.176868753748659 13.060170576169279 14.695998796249837 C 6.561009235879636 14.710047039074174 14.713520853024061 C 9.802582936614845 13.058958338731134 13.078002132511747 C 11.411412101005194 14.700909733047437 13.124043227098721 C 11.457521724551244 13.069258939830188 14.692652058307987 Si 9.816711533645764 14.689211078036553 14.711412547118126 Si 13.091594707552860 13.073798810658719 13.067998436450409 Si 14.680552863162685 14.709184107501514 13.041279701632508 C 14.711107042651777 13.088416751426388 14.685666478094021 C 13.074693231673821 14.735413082209934 14.688932653961777