500 Si 0.022046051659269 0.030560782451051 0.024601326718576 C 1.686455651665260 1.667301792670688 0.054180737633903 C 1.674643600775548 0.001794575542566 1.684123874103444 Si 0.009367667619817 1.618090350471606 1.731232508174547 C 3.336742914366534 0.016684744556805 0.010165672080799 Si 5.000972749874387 1.688135160476242 0.003251664515574 C 5.027670682436574 0.017703719670976 1.662730419494135 C 3.357094626151214 1.714889823869015 1.636778564158550 C 6.716673622510319 0.031365770290859 0.028407654807687 C 8.405591693012287 1.648091975950533 0.011562344998287 C 8.357405134230124 0.014391008182765 1.672877092037055 C 6.703550671048673 1.660538157972267 1.677653380158735 C 10.063957268985710 0.034930778485972 0.024170789784052 C 11.730302388898611 1.690747767002011 0.004171356454986 Si 11.732984283019636 0.025097013404257 1.701345565951268 Si 10.032851842710359 1.667989553099688 1.664375349367684 C 13.405251078964010 0.008908792914079 0.018372586510473 C 15.041144721782800 1.698967930430219 0.051741878348528 C 15.040940524655676 0.030569968625865 1.671969734295421 Si 13.396137014687421 1.653904052362455 1.696494987236562 C 0.047998295529589 3.297680100262385 0.021739994165404 Si 1.697423128531536 5.038863925462346 0.001116456833900 Si 1.715381861548605 3.358650134226344 1.667923980404172 Si 0.010489681927216 4.994685572738916 1.686398489776175 Si 3.355899716701073 3.385695290728421 0.012277713832656 C 5.040942369977175 5.023138102890115 0.002270280378243 Si 5.034031364116460 3.354662561317895 1.656053006469564 C 3.328813483534251 4.982407678432736 1.653576923825885 C 6.691712673105065 3.319315809812197 0.008600220155185 C 8.321160138673225 5.032082382395637 0.018470053016770 Si 8.400977041711462 3.326968108923614 1.642949141889106 Si 6.694501595602806 5.033827436773104 1.642619292446539 C 10.020606833082441 3.354552388065365 0.024316468568630 Si 11.689160227039823 4.988774639576461 0.004511982055871 C 11.694327228882310 3.372981525469532 1.705037456814850 C 10.068460625992003 5.027626465406247 1.650034037464924 Si 13.376801889974963 3.338959838098582 0.005878072664527 C 15.051108740445901 5.053191625742581 0.012405174500349 C 15.046472714469781 3.315437323897926 1.709957349317055 C 13.381458798212524 5.031704438390055 1.671271891014056 C 0.010828718595065 6.712801645848044 0.022035831379283 C 1.640489381197562 8.377007679776970 0.023337496344509 C 1.693061849594887 6.669268291697372 1.686305822909640 C 0.050751516297493 8.367444793963138 1.684806483144864 Si 3.304176193817520 6.723167455000874 0.014923123692271 Si 4.994962329974540 8.345053641689816 0.032103024546411 C 5.007143273971012 6.682958548694643 1.662029814454934 C 3.337812228501338 8.367986127582174 1.663415232674726 C 6.692730396519535 6.672562592724844 0.043009474155998 Si 8.396650292529632 8.359362563700204 0.010596123713897 Si 8.383491625011091 6.661861100896076 1.674080719460574 Si 6.701270428568902 8.368229503058199 1.722038661327129 Si 10.063852599899189 6.696579725615903 0.025257478904922 C 11.704779192313254 8.401156253254054 0.060123015993318 C 11.729148274081449 6.666898153714147 1.699965786212368 Si 10.028752052144302 8.380028154501012 1.659559504805415 C 13.355433076873531 6.694575156487794 0.019328701785564 C 15.024627246986320 8.388756946579020 0.006479518395342 C 15.089521733852671 6.711628028108571 1.632477586773123 C 13.343372445671308 8.339401687986653 1.666248156816549 C 0.008760221209147 10.062060392628636 0.025040906178460 Si 1.702854142863782 11.723211770046625 0.005137611159209 Si 1.656104286434988 10.033666367647989 1.665992794072702 C 0.027790105437029 11.691182953264923 1.682045325670630 Si 3.362711623639501 10.067762147603242 0.018318271286004 Si 4.991953926750424 11.703762209644134 0.021465586108685 Si 4.998417073239521 10.019565217609607 1.669919433807877 C 3.333138372790257 11.685208864187405 1.665532994977682 C 6.710199107060445 10.044605921050865 0.009719419478192 C 8.345960416262223 11.681620944940232 0.011658414676466 C 8.354639319100240 10.066332987874231 1.684604399366178 Si 6.668706783334540 11.769409240602700 1.694145589851722 Si 10.057968655709752 10.015135815050902 0.021769633913873 C 11.709029594374597 11.697490960060428 0.001278041267056 Si 11.714301296952712 10.013754285000873 1.614290262671675 C 10.085208514314814 11.691373859312076 1.698442053977673 C 13.364804857152784 10.032618672982244 0.003137152952144 C 15.078951030277056 11.729747338417198 0.010277445109883 Si 15.050170658802356 10.067556872906593 1.691708458461526 C 13.424469669036148 11.706791684640747 1.670162341435385 C 0.000365998853168 13.399169900506985 0.059231303243301 C 1.658191971885033 15.027225077519036 0.031799351237301 C 1.660609509815131 13.390091914212201 1.646746068657563 C 0.012626047348478 15.025439000367610 1.651778148495233 Si 3.358699660982305 13.410920584468199 0.032789465185449 Si 5.044366400365910 15.052022762140343 0.003552616867252 C 5.002545313196882 13.394646905042263 1.674576327891273 C 3.385594856564699 15.047664654078705 1.705274825365825 C 6.690924165991395 13.394875124954391 0.021408647706057 C 8.376432850516325 15.065200197741557 0.022262649108081 Si 8.376774463227516 13.393011709546705 1.642321368027365 C 6.685858229881875 15.042249492207342 1.676579065746996 C 10.013648866841892 13.387929796443833 0.000341507449573 Si 11.681086646093894 15.035378420942614 0.019942293788410 C 11.735973073734479 13.346866951097544 1.649148864930705 C 10.007704686372749 15.049245089199013 1.668180016374645 Si 13.417850382975093 13.372912872744847 0.019378211189942 Si 15.032728887259003 15.029262647912137 0.023836789982887 Si 15.050835988159797 13.414774644859573 1.689771602194185 C 13.423230490596543 15.062630401872767 1.678908516429274 C 0.010842647129880 0.000049920222545 3.351486838078416 Si 1.661424174049163 1.654567319522402 3.345234352687447 C 1.646922513080044 0.027249998845320 5.020495646376925 C 0.011108482238568 1.665106634522523 5.051714888917010 C 3.348909472317435 0.022127348062590 3.334660133360442 C 5.018946436517209 1.685476412224633 3.314306075215720 Si 5.005997597806212 0.051248039493884 5.005078978941552 Si 3.355381850193892 1.679417110599099 5.028383204030919 Si 6.737903238672310 0.014015393062418 3.353506252035134 C 8.335739147406750 1.661829705321448 3.330626459548152 Si 8.366252804561620 0.032551721831137 5.041462955741912 C 6.712873893580085 1.682566529657704 5.051543751651853 C 10.021219385527788 0.012620242137224 3.340768153339173 C 11.708664818949156 1.647309398349377 3.369126577921177 Si 11.726389980310492 0.010449646915380 5.031608137225795 Si 10.034225510082253 1.673259451437118 4.988983955862223 C 13.394839258436004 0.012550745173608 3.347266397190457 C 15.072655938959905 1.656306365708417 3.329666431992031 Si 15.059713309819790 0.023520475921034 5.015050488525331 Si 13.421487879421059 1.645747791881449 4.996231515682357 C 0.007524798544663 3.344249410698805 3.377192379631228 Si 1.699280922285311 5.019785664581993 3.373636890215816 Si 1.658283694033655 3.374050458818211 5.026471674990525 C 0.009663631863345 5.035154569328024 5.017523533948577 Si 3.367157866042735 3.347281398525034 3.372940502600396 C 5.020867667612477 5.019850085811429 3.333464069756342 Si 5.002783304956455 3.336826048499722 5.032240373502828 Si 3.364805373265765 5.008541215233211 5.046833100757532 Si 6.724497621523813 3.314208577144118 3.307718790969683 C 8.359712958521254 4.990219668649004 3.404117054135878 Si 8.364218220709457 3.326837095587494 4.998155666512575 Si 6.687562234474830 5.051508584225488 5.016807081603922 Si 10.050956189849202 3.322140528971073 3.328942972968866 Si 11.728026309436077 5.032453294708865 3.377260999568803 Si 11.761201630069182 3.366435624064708 4.969792903296847 Si 10.055824336863040 5.029541053875390 5.000790959497609 Si 13.411626854515669 3.344340449418899 3.347941094419152 C 15.040141583906109 4.994392241801382 3.323091837624430 C 15.056164773615816 3.390335469006188 5.044654978301456 C 13.335068586360730 5.013255612704171 5.063259158557933 C 0.052907877910779 6.696769452846860 3.316087837755669 C 1.675010036852027 8.406634343275764 3.319337960923895 Si 1.679365891622528 6.694297175331656 5.024800654411471 Si 0.024781393272968 8.346875739908487 5.018139640088805 C 3.369392432179026 6.709115124208010 3.379837073035782 C 5.027953708500853 8.380877926383333 3.379844454987993 Si 5.017762849102584 6.686202971774193 5.050654012665093 C 3.293614284626849 8.351123477834960 4.996379977983280 Si 6.661587827215609 6.674794034862387 3.357147696875179 C 8.374624793608058 8.365214584391579 3.290747063667512 Si 8.388939286762183 6.660769064475788 5.035733769565431 Si 6.664004150388818 8.356157139495359 4.981327301952001 Si 10.033396924434465 6.714229907802165 3.325692594650746 Si 11.739311070399902 8.392595441718601 3.383494329252736 C 11.736605164730427 6.691337046934470 5.045603458333527 Si 10.036522843302862 8.338291980736427 5.016961624799386 C 13.398367469457378 6.681853519973981 3.364753044135942 C 15.059819846407956 8.382876335984744 3.366571846446170 Si 15.036901996746021 6.697485849634363 5.014943215064005 C 13.355617289784801 8.406147317688418 5.029028426915827 Si 0.012379197095948 10.016616960586607 3.366401813712407 Si 1.677804689390383 11.725672878239719 3.363265785557764 Si 1.642880445594560 10.054257583684016 5.025370234893423 Si 0.010299137554750 11.695551044785754 4.994102681496310 C 3.369805903746149 10.083374802515277 3.373222678797268 Si 5.025163996620451 11.699347145810503 3.350261170120879 Si 5.035058580115586 10.069298735951497 5.040855424647104 Si 3.357311581943231 11.741861546799669 5.029604668637087 Si 6.687015918680773 10.035353472758841 3.333572952079184 Si 8.365158914135295 11.713527760048800 3.337910231406724 C 8.368166215163347 9.994124664746394 5.020378124969610 Si 6.708742834327596 11.710471098188526 4.998597210183938 C 9.995745808006783 9.998261640624895 3.377899774393010 C 11.744656260329361 11.738192945498126 3.361023017346063 Si 11.712761412003163 10.064083343370177 5.032176077258553 Si 10.071065333884917 11.723993995450291 5.008321876126113 C 13.415778235722865 10.042302742151561 3.343070045841757 Si 15.064089546991802 11.678737520824713 3.290673632804345 Si 15.061371533162591 10.014478396948519 5.018228070934843 C 13.403761292014993 11.726873240700268 5.020096883243844 C 0.015372644179860 13.386329847976821 3.355874084071787 Si 1.703806775611038 15.091803512280871 3.372418034005875 Si 1.661070685058780 13.395000603028144 5.003446664356564 C 0.016531457473607 15.083334091258344 4.976623719205677 C 3.328023498870533 13.381455887740332 3.352855677124351 Si 5.004089215609178 15.045723646549893 3.343713880872148 C 4.998804710578266 13.429872761753494 4.996977429482128 C 3.321877987321653 15.009250365597921 5.050250343382209 Si 6.712012094558793 13.369372077337498 3.322253479466954 C 8.384957355204246 15.031344558264559 3.317764172610763 Si 8.363014530335189 13.407718188736554 5.028736597053263 Si 6.668662685401426 15.078064184179176 4.992792827252352 C 9.982350099813827 13.385030600702924 3.363732238289918 C 11.681435703486931 15.047618984431177 3.338933564603976 C 11.688139626160583 13.367124536358505 5.001573949715357 Si 10.072618392941132 15.030873268074060 5.016817754325709 C 13.379075261251749 13.441724487781844 3.334049987597780 C 15.018667433396347 15.063492830775559 3.387034393714030 Si 15.091854739018888 13.379757792408121 5.046056796113258 C 13.382158043193273 15.035282517041844 5.028544934358784 Si 0.016610061183237 0.032867812135742 6.674011375556117 C 1.711083085291261 1.670390798176520 6.709531809382542 C 1.641750565347410 0.032894921508596 8.413610943679474 Si 0.010429236155581 1.705321652872034 8.399775437301454 C 3.365931618039156 0.033231963089775 6.677164083550107 C 5.054446641280785 1.668731599834585 6.648815726851669 Si 5.001866639666845 0.017396090732897 8.377591423814575 Si 3.326662928069126 1.695554289515096 8.375732079267081 C 6.665225649919557 0.007048027202208 6.685641850049485 Si 8.331230583180956 1.690740226627741 6.723835593494480 Si 8.371650141441885 0.012937290772827 8.335756034978806 Si 6.717469910297127 1.644682275467129 8.367376012033173 C 10.007782176118402 0.033651800420059 6.706659896124248 Si 11.692146073023423 1.680880492456049 6.706826976648877 C 11.731881176298906 0.018570306122339 8.379207677650200 C 10.079311566777340 1.684754589791253 8.388298901253856 C 13.353079286459508 0.039049706634673 6.719158053649640 Si 15.064599134036969 1.666723519533285 6.663346529828809 Si 15.066873003473734 0.021182827219017 8.352693368334764 C 13.371794864854564 1.676507908187031 8.357116584247803 C 0.001389660572432 3.358903235139449 6.677791517620231 C 1.663521262765435 5.042020548201688 6.675034308559056 Si 1.644744235267590 3.360755580947383 8.370527737834269 Si 0.014342651453269 5.039277135630360 8.364255043653118 Si 3.312778104337045 3.372676654271510 6.693541714850119 Si 4.992164579765618 5.036181664448324 6.660814901431131 C 5.003809501219867 3.372658420004461 8.345755292555276 C 3.392167506853894 4.963710452588352 8.318468328343434 Si 6.686698673942979 3.338136920717187 6.661046062056478 Si 8.373314424537009 5.037290443580824 6.722422520365377 Si 8.386274931311126 3.316719144373172 8.364597920372756 C 6.686858714806380 5.010965304403707 8.335814469047364 Si 10.058902431781343 3.373555694211052 6.716732565930875 C 11.756665657546097 5.011857879913006 6.688797752983833 Si 11.683935970366079 3.309280701530046 8.381184153605709 C 10.061123436027264 5.043485320565869 8.389199866076190 Si 13.366822656718416 3.353910925806558 6.674187573001723 Si 15.029196323613981 5.032368211677994 6.701273508634615 Si 15.048651111725686 3.341658682568222 8.407781565002718 Si 13.396092679654920 5.034148093067460 8.413235565867337 C 0.012835164540071 6.722128564285475 6.666583790677509 Si 1.638270924572627 8.361449350497423 6.692117686734671 C 1.680212947907620 6.661950091789419 8.333659029021822 Si 0.031254660081269 8.377126210449500 8.392598397468063 Si 3.378610282556309 6.671362728660963 6.664695696867481 Si 5.038849867340353 8.370519135892224 6.688007201437312 C 5.045025221322407 6.732372872219699 8.364091360156619 C 3.394017823195000 8.391045595906636 8.366666851333358 Si 6.720729721545393 6.675990772523539 6.671189859857808 C 8.369362591326233 8.335783570162523 6.663621085872570 C 8.397445252246428 6.637575973631393 8.381753765152432 C 6.751696468239516 8.366433332898492 8.312372837398259 C 10.060945098745394 6.715696371686890 6.694424135376129 C 11.741312523949773 8.354115785352693 6.725071476390405 C 11.736638036651902 6.699926371289093 8.355543929726409 Si 9.991173546270611 8.346501759454833 8.385118289901762 Si 13.391372865134365 6.711891428826432 6.719579847801586 Si 15.059210063076495 8.390104621548060 6.683446406400971 C 15.088375819256900 6.712429412511965 8.405116808486259 Si 13.368022680262474 8.354744869996148 8.390923741941286 C 0.015958254079536 10.028372986020303 6.722866346558317 C 1.696932777694125 11.701694365296813 6.739515567879600 Si 1.664216579478564 10.069527844913276 8.366916443130719 Si 0.028988184305783 11.731517404100490 8.363964489154979 Si 3.392331024886039 10.025953408950128 6.694348944207033 Si 5.024774316747940 11.743239491180795 6.679178915192276 Si 5.030027384849818 10.017862268786589 8.344689225009274 Si 3.321472057263509 11.704332566362458 8.366958656859893 Si 6.713409469655051 10.035682030469484 6.687268736878034 C 8.379795522391923 11.708022872729678 6.654242721363956 C 8.377855281543777 10.044468965245398 8.386952514129279 C 6.738443144432132 11.726835630287530 8.405909073153866 Si 10.073226606302478 10.055500376862364 6.733848895571262 C 11.700048230070642 11.676622745251365 6.733152004963395 C 11.697025476793112 10.020378577534485 8.371604714932774 Si 10.043522521269923 11.681308387721304 8.366343601062104 C 13.405982532427249 9.998521105878440 6.693714119804866 Si 15.031632409753517 11.726077237833602 6.720984261908870 C 15.073231352463685 10.029121706259518 8.344183918272130 Si 13.418840246354408 11.693265733231184 8.393427397649548 Si 0.029202593757736 13.370264935438129 6.699832372890472 C 1.701178551847458 15.064720761612511 6.690119902651220 C 1.669531108110914 13.385948198586487 8.372576490220624 C 0.046347082852084 15.041187362537880 8.389269611530308 C 3.366612241338668 13.379786524130072 6.699075539832600 C 5.009102147780039 15.055013289841023 6.692607350181206 Si 5.010879792125905 13.378761637372595 8.382041591791086 C 3.359971601275467 15.067587018805366 8.383848811629075 C 6.746164995596249 13.389074978042052 6.732581638215374 C 8.344946362731902 15.051422852062387 6.681661563052691 Si 8.393166543498388 13.409939290656643 8.397844497954749 Si 6.685455015530517 15.039333155902328 8.384538482518549 Si 10.045280689520535 13.384213755838962 6.691929168989219 C 11.739243175507770 15.060399533185002 6.717224891932954 C 11.683918599878782 13.383815776549071 8.392133858606933 Si 10.031771997912422 15.048250437990484 8.381495401013213 Si 13.413172573391194 13.403279320560227 6.690042609998029 C 15.067637202408671 15.071898930058438 6.667430655160992 C 15.052636810317344 13.367571342759478 8.371283297123249 C 13.382651110189732 15.029899890279731 8.374107858183462 Si 0.036220391324668 0.006562700817361 10.064447875111917 Si 1.666162148310416 1.672002337290419 10.046611129323805 C 1.704505476859662 0.004910985823511 11.716614816303313 C 0.003755175477876 1.686245448834905 11.668839817969952 C 3.327104830470279 0.020779387097551 10.056997734400325 C 4.985659035509890 1.669940940960529 10.082657184052131 C 5.046319468190792 0.031361715343183 11.707462658506129 Si 3.406431262689894 1.653017384463195 11.697867641861269 Si 6.720667715946040 0.000385183753781 10.065207760384265 C 8.372218812498458 1.675220616826131 10.060821688587307 Si 8.359769535561812 0.033201409256778 11.691013529878157 C 6.662997361618612 1.663679455266125 11.691887378239086 C 10.067650607471098 0.018251138693586 9.991998220120943 Si 11.722662327744487 1.671306321160025 10.071392155344284 C 11.731138712273141 0.016230529848173 11.741396376294460 C 10.012895570831514 1.710487447764452 11.776174989623112 C 13.382692823077145 0.011696481456149 10.036115411417480 Si 15.051581389551130 1.640450954506536 10.012928296299938 Si 15.043679278452375 0.028466972733517 11.732690490903289 C 13.392737249142950 1.630664951539856 11.667950023165817 Si 0.027842545760282 3.341974840132152 10.045293176695385 Si 1.648782815716349 5.045816838507178 10.036205167802615 Si 1.686295680797900 3.410535786843445 11.711713487676004 C 0.037401202062576 5.062653944818486 11.726729982201359 C 3.305300570010822 3.292060497343796 10.007002778667486 C 5.018096425831851 5.011018151234319 10.060975314031801 Si 5.028056413418542 3.355720519137169 11.717507796727570 Si 3.356556649459135 5.018082698777372 11.728326970879829 C 6.660229026742296 3.312805172159957 10.076961514462493 C 8.380878264880284 5.041613523030857 10.019919666775976 Si 8.367531781927847 3.325193371278460 11.716740431141366 Si 6.685709140602653 5.026191891677770 11.715690280630843 C 10.046291370458482 3.324548902974836 10.053220737393275 Si 11.707566039118889 5.068418688074875 10.018928179097413 Si 11.722583039741870 3.367100599808833 11.689384947614645 C 10.034639909472663 5.009453224558237 11.708610962779019 Si 13.388489005693986 3.322545901759716 10.014095916189138 Si 15.088273335689289 5.058162923364760 10.065634908575570 C 15.027739767261025 3.349447192348934 11.756702655755918 C 13.344034371057955 5.001866281893198 11.717834529778806 Si 0.023346137299140 6.708902521620852 10.022237440428105 C 1.677795032672651 8.359364308027439 10.081020969908392 Si 1.705267911460516 6.704106744560031 11.719513208020251 Si 0.034240940419047 8.338783483091792 11.744373206325760 Si 3.377376192861532 6.725584517826357 10.042497438763814 C 5.056218333543662 8.342060466474182 10.044780112860657 C 5.013134137047190 6.706910292793360 11.731649180294903 C 3.396696539358692 8.406840156228315 11.698477742581035 Si 6.677020658103718 6.688411844420609 10.025428960377292 Si 8.396635589675483 8.368380657202030 10.075140307497049 Si 8.321916023513980 6.702829372704670 11.716066960195159 C 6.738120310990261 8.370198981510240 11.745943758880486 Si 10.069129688654094 6.672772162609282 9.995940199531605 Si 11.731302279645252 8.350292046995889 10.000144989525158 C 11.687603315624456 6.681072819938654 11.766156380527235 C 10.078852127249254 8.363954975778416 11.733867773342819 Si 13.420702887531530 6.684448175524399 10.065535281777963 Si 15.052091237481690 8.345126108814247 10.072675430498201 C 15.084096106690865 6.690726621493839 11.763240853869576 Si 13.359194250674488 8.357292838804939 11.698826357035296 Si 0.018343135192712 10.014448115379563 10.016584957347334 Si 1.698658185349416 11.649558897842200 10.057745694861898 C 1.670035638661380 10.019255877871581 11.746432058920554 Si 0.008396256934701 11.699925507901982 11.700768602004421 C 3.297159810046878 10.039561977193706 10.043940809186877 Si 5.021634283913252 11.758699829457409 10.071774800178375 C 5.016405052234116 10.017902006997371 11.681814858575070 C 3.372895610932111 11.754378932422085 11.737734320053189 C 6.656667108407666 10.044697969440801 10.049246185959083 C 8.387140172283365 11.738478124854696 10.036161187320168 C 8.382875367661031 10.045820183888862 11.716399852176563 Si 6.710511802537840 11.660267317926506 11.738931528125967 C 10.028731775412872 10.049531286064573 10.090137582966204 Si 11.703149503440372 11.670336318584521 10.067918141214049 Si 11.742287160654499 9.998157063973622 11.677620922573341 C 10.053496736225059 11.696949986142338 11.736498342890304 Si 13.360281588580117 9.974147551322114 10.043621985710454 Si 15.048456293016445 11.738041116281670 10.054079051109568 Si 15.086118810629529 10.029310563456571 11.711707551017190 Si 13.377312677699326 11.726640305045251 11.691121664177105 Si 0.027905035646038 13.372071313441227 10.021916152138548 Si 1.666104277842739 15.037347727049777 10.022112980872068 Si 1.691560108929030 13.395041944342635 11.712542262122856 Si 0.014280843853866 15.087785429252484 11.722108005765877 C 3.356032904597505 13.369720665444422 10.034766825334618 C 4.989316720534201 15.006421194130336 10.063636881992851 C 5.061792348024204 13.446531785887453 11.718417077809340 Si 3.355064757590304 15.042818643211071 11.719155306903760 C 6.693896562690479 13.414147590569195 10.052622153871214 C 8.323613624620474 15.066110459000560 10.074302847420805 C 8.333587516050574 13.423889326874942 11.719996709578810 C 6.666790906191114 15.024390403571989 11.709199159748398 Si 10.056138020513886 13.378433543104352 10.026348587474924 Si 11.737319435056385 15.059713432273497 10.025505494350009 Si 11.731768700669129 13.355186029253471 11.713370422623500 Si 10.091150771201805 15.070207187125980 11.735967076737653 C 13.379961276875097 13.384275767814664 10.000654335081018 C 15.080870093045215 15.065270493453776 10.067336405213904 Si 15.063324506451398 13.353920440642318 11.713911399157766 C 13.357169749687374 15.059270438459222 11.713465442303896 Si 0.016271445109690 0.012226391582496 13.409892859003952 C 1.689922828219372 1.670731894653253 13.381327881476800 Si 1.656073387509006 0.025360951678653 15.060244678697110 Si 0.021981682831148 1.651677537382150 15.081193561816185 C 3.356805238155983 0.021120087518704 13.378020589703098 Si 5.032254702823344 1.667284363575936 13.367962831531575 C 5.022178556125813 0.007724992092640 15.055458915046509 Si 3.315829980293545 1.665873413125009 15.090133242358709 C 6.708147159091248 0.005884619229072 13.419093351651993 C 8.375101670419614 1.707163192333111 13.386420000975608 Si 8.346887907156709 0.024066833724382 15.060417751475736 Si 6.719820920621739 1.640450878191915 15.074799728529884 C 10.063722002642654 0.019613977723424 13.361908274286245 C 11.704725531821602 1.644929061714114 13.391716880423985 Si 11.700801131408944 0.027710141567080 15.034693479421406 C 10.061848820855927 1.652188625758823 15.038580125475093 C 13.384537218069926 0.046981703255111 13.424952478027787 Si 15.079293601105558 1.699444147965576 13.356498458983207 C 15.085103924210435 0.032021203872194 15.067074188565813 Si 13.393993288473261 1.618752797558556 15.090012064389015 Si 0.033309224122594 3.351024006001798 13.420025119673690 C 1.672905580542545 5.029793926079176 13.363265358912514 Si 1.723845439612671 3.337710341240236 15.091205917490544 Si 0.015150894013090 5.034979921356817 15.063171568776024 Si 3.331151358883963 3.300301599179891 13.362324766223804 C 5.049380349075207 5.034701799002047 13.413005888061736 C 4.974676393542494 3.289811665051150 15.059941739872096 Si 3.345043304020639 5.059166783365920 15.068883073982784 C 6.663464596325170 3.321709391373271 13.418315039869166 C 8.383385092329791 5.006513947613345 13.372354273247794 C 8.394617519876101 3.340247561613946 15.048933507356798 C 6.691383992142796 5.033070033506510 15.063349339863104 Si 10.015477704520793 3.369571088683160 13.410430722740005 C 11.687493079173242 5.005351027613753 13.403845202951574 C 11.740261468914550 3.329793844114630 15.035131033133103 Si 10.056237897369657 5.040318710550595 15.090824476539986 Si 13.387874126685180 3.363400324124823 13.353277464619346 C 15.011235327016099 4.971594779678076 13.336697668417182 C 15.032301761333311 3.369814070296384 15.042941345148638 Si 13.369327165282714 5.024475151450125 15.065922005805270 C 0.040371325637988 6.674180794242257 13.365222734344705 C 1.621801775535859 8.368467378951593 13.415193103516817 C 1.672411894611399 6.647392356113569 15.003201723941929 Si 0.002727204289617 8.364425314203128 15.031629115629464 Si 3.353899620768829 6.732815144809649 13.350336469506132 Si 5.032913647281945 8.405004474019393 13.386858271110450 Si 5.050709835052373 6.662734445657293 15.077518894274021 Si 3.365156195106293 8.352537178055760 15.081567906266370 C 6.713112906345016 6.699780309322559 13.403038164553106 Si 8.375801845603114 8.356114368132650 13.388977533580944 Si 8.377813012115590 6.678603693353636 15.057812883925468 Si 6.688063317386113 8.395387241181393 15.054306725061601 Si 10.020385980295902 6.661744952468061 13.384042858194713 Si 11.701972012616757 8.343806715422710 13.408389746299934 Si 11.684323901076922 6.660837913851278 15.090533256898704 C 10.039359743931085 8.347759828782058 15.027912480434834 Si 13.382317757558333 6.673495918364937 13.354906458247601 Si 15.033718730696835 8.377474059479486 13.410405626588972 Si 15.016725554655801 6.659327482663745 15.073042828429163 C 13.414238944707778 8.379674652754598 15.070334220728636 Si 0.037639635340735 10.059438466719524 13.352245835388112 C 1.673652158273153 11.719367052567176 13.453360141004373 Si 1.692384500612629 10.065197340862342 15.091478539290318 C 0.023918201365045 11.673625283000284 15.066221775296970 Si 3.372327631923554 10.031227908020453 13.407971585296050 Si 5.013372204570896 11.730319937204040 13.419343771020769 Si 5.021680648355313 10.069239686413614 15.070885025482085 Si 3.358203202916198 11.712218218884018 15.028237385194764 C 6.680309886025603 9.998414435381731 13.383590948334390 C 8.364205440824852 11.687207987057210 13.362715670252694 C 8.356614588747883 10.067672327579215 15.041416085153644 C 6.724845813198541 11.693955928981620 15.026762813590059 Si 10.038801251047712 10.060159054831134 13.374976671355594 Si 11.728023638281531 11.711901806790383 13.402753559915494 Si 11.674397223306043 10.051771975659594 15.081489215818310 Si 10.064127138349621 11.703391303552481 15.059720648709378 C 13.379567881984700 10.053659584589450 13.389318109590741 Si 15.087536255402036 11.710646284647392 13.359351474872071 C 15.028850719127872 10.060222930056785 15.048389340541169 Si 13.368038072089035 11.722306082349450 15.027369830157532 Si 0.019725376946386 13.384866456528060 13.370779813669330 Si 1.637988204775155 15.082814518933640 13.406115101473180 C 1.686535737711540 13.347879926965863 15.052222496604989 Si 0.011238136981256 14.996765303251413 15.076103277622853 C 3.367929414655561 13.379226955859878 13.390848571302575 Si 5.001887681229620 15.071948161395987 13.404879310664388 Si 5.025755771611403 13.364896125721030 15.044640627160895 Si 3.376083622234191 15.062020579357748 15.057332694422222 C 6.656251086749756 13.368240810431541 13.419897191467308 Si 8.389704526188099 15.031710930026280 13.404974525648440 C 8.388482267010341 13.355593763761078 15.037604457645008 Si 6.698217825064387 15.075067891948592 15.051930754299647 C 10.037837747760006 13.418480074844277 13.373132201176995 C 11.719864550539038 15.067983829968137 13.354707454446263 C 11.685557427577583 13.378248078448582 15.053683764000313 C 10.032476169510213 15.010840800795828 15.069045208564301 Si 13.410009115091718 13.385712237891072 13.379437293081221 Si 15.047853661693994 15.047552964117159 13.363314281131030 Si 15.048325477551471 13.354512743257375 15.045352317883530 C 13.387469078302868 15.025576023303493 15.084811650321079