500 Si 0.023876332381917 0.037422886000663 0.000214810007868 Si 1.699943296823589 1.692424948960811 0.026447499946181 C 1.707715366673485 0.060159826361892 1.717668823282502 C 0.035351845162774 1.709125625065422 1.661103828044171 Si 3.426127909916783 0.014904997071377 0.000869603012602 Si 5.113673861933493 1.741456091838554 0.001803312532573 Si 5.166914868550800 0.014060402977863 1.773251318876714 C 3.414952884722444 1.709937189136808 1.696306063091832 C 6.822631678345610 0.039894113910094 0.059832401259972 Si 8.576567978679339 1.718509056010494 0.011522036081670 C 8.522041162132529 0.023531317606208 1.713914474232688 Si 6.838599193188685 1.693312750794253 1.722265889772062 Si 10.277618456742715 0.017509624341166 0.004140949159627 Si 12.021260367738172 1.687142983060216 0.023467385172384 Si 11.987645745007468 0.004735991421565 1.692939619227540 Si 10.311920652223213 1.689829421824776 1.688081203812875 Si 13.655117419677687 0.001453146414622 0.027091642666703 Si 15.419315183902230 1.709631995693038 0.059177099052954 Si 15.417685093117880 0.024743796605678 1.738523417545638 Si 13.716920330526694 1.739718276059487 1.745951814617922 Si 0.002036067672696 3.401752728412179 0.006843350995529 Si 1.728410561130853 5.157137409612502 0.003639761496894 C 1.722087548198991 3.423226081133530 1.735522076705233 Si 0.029787543884414 5.115860027611977 1.702976470122612 C 3.421722545751976 3.443346379851454 0.038116973752572 Si 5.147003373659589 5.122999757094274 0.007891020590333 Si 5.161462008782210 3.395938870754124 1.742695982094006 C 3.396129649884493 5.149137567537011 1.700444947199954 Si 6.848979472370147 3.457420741542296 0.017146442924731 C 8.537752234246561 5.139343368121222 0.028351837415594 C 8.589747447309660 3.457526001730553 1.663622572730052 Si 6.865208751186514 5.172822221321848 1.689127969348209 C 10.306464446843480 3.404604606485061 0.034103857479904 Si 12.011520948413837 5.136794454203702 0.020376613555553 Si 12.000242479009922 3.460453387547376 1.677664251386511 Si 10.252513704132726 5.165756879704885 1.681801257323353 Si 13.654694602131556 3.419065384849619 0.020665537377698 Si 15.387146477160559 5.151110960032955 0.017766137300852 C 15.447568852955811 3.415040079837921 1.712835404845573 Si 13.702349198237275 5.120453452928756 1.703334696142355 C 0.030296250465033 6.837607827593420 0.019101755338614 C 1.744693924246932 8.568490838050440 0.022838062640777 C 1.742704059897637 6.840287163654078 1.723108071203975 C 0.012205315984387 8.584987406693681 1.741811813197311 C 3.374859470808724 6.827628808185646 0.042139451884362 C 5.158372847861592 8.564516022424920 0.028333914506714 C 5.129930933999197 6.899329207667737 1.696498154907954 C 3.413033679652336 8.544723569478474 1.705145587638760 C 6.810551790654334 6.847739456877528 0.001114243726081 Si 8.579652918401278 8.548140658037745 0.034147627959348 C 8.550408673402050 6.833998442303550 1.746485446950626 Si 6.867321198380404 8.548774198727214 1.754822189233661 Si 10.247357668314823 6.846750108549678 0.014002786391911 Si 11.999577022573508 8.562081116432640 0.020644879713672 C 12.001545399290588 6.833357951678356 1.725010010640430 Si 10.247442484067166 8.603970656388693 1.680782353526416 Si 13.706634344070364 6.869675046330699 0.002661014006980 C 15.385746124445676 8.558017272371925 0.036190255515615 Si 15.442583381170424 6.872616826909677 1.708497690161174 Si 13.717869288124625 8.601159047745261 1.685863090678552 C 0.007451959656780 10.247633554656504 0.005425485507171 C 1.740992191409331 11.979829884636647 0.015222721049736 Si 1.729038366988013 10.290270048356614 1.682358887221423 Si 0.012657777265181 11.970446616075332 1.724285697241068 C 3.457803860811565 10.236033492349048 0.015738719122847 C 5.144767783272790 11.999234104739708 0.031060687484762 C 5.154977909460317 10.267334728687308 1.728294331153252 Si 3.419491306724043 11.959428325047604 1.732426238482705 C 6.881593134324641 10.342252333323318 0.023783853866547 Si 8.536974520646632 11.970327681671206 0.015584738886863 C 8.567497579294217 10.275122469306996 1.750091481365807 Si 6.840045095672096 12.011433206987544 1.688705080872275 C 10.306805596033033 10.291596224484428 0.022978712862045 C 12.012454486712310 11.990990520964365 0.007013225688625 Si 12.001107537108208 10.265869045693904 1.688474038767425 Si 10.260529747256633 11.977781153927369 1.685795057254817 C 13.661046181707874 10.290892799244723 0.008803711183605 C 15.420574140320753 11.971744662905071 0.009502014788482 Si 15.406827739639102 10.267314874099172 1.745799300608448 Si 13.687049127008386 11.967037642371999 1.732601054686615 C 0.002875609141742 13.688300029517382 0.002257175802481 Si 1.706545809472850 15.436670918013977 0.025560120759889 C 1.721701417370936 13.682900399729595 1.741133171032313 Si 0.018522077583750 15.388435735195264 1.722646626593671 Si 3.435442986048152 13.682429216068591 0.023577837971565 C 5.144227200174184 15.391187772516254 0.026999976152132 C 5.146447376660041 13.673696095585271 1.737116997965414 C 3.458683382324669 15.429278707492712 1.732397128741363 C 6.874870832030424 13.738168429969132 0.041094565719710 Si 8.535079406122227 15.385905643850789 0.028545574276790 Si 8.572390669721436 13.686516076337123 1.700497538527352 C 6.825425997767868 15.407838338652223 1.700400964128195 C 10.240291901885485 13.720497348116202 0.023337530016481 C 11.993825600050425 15.424039409013634 0.030815756192293 Si 11.956383865759252 13.683360403698259 1.709656466652524 Si 10.290151596864279 15.408155699286619 1.719645488143348 Si 13.688355242510140 13.682927971879296 0.002122393438053 Si 15.404726869721625 15.385696304935774 0.012018012534211 C 15.438797851019801 13.682528283206185 1.718839601928661 C 13.711874802482649 15.423788112793124 1.726601773186618 Si 0.001915503332389 0.001715845642282 3.402309168835743 C 1.744339430987934 1.766705531248519 3.407201133603330 C 1.704660875719680 0.042318607974627 5.164050687652076 Si 0.004561480089807 1.728242268671288 5.125400232069985 C 3.410321312067059 0.025735773455482 3.464102958492102 Si 5.151739123381728 1.687802234030765 3.429251593369926 Si 5.157679056360558 0.002789498281412 5.166672754499620 C 3.451510868367696 1.714567875118894 5.109271151417925 Si 6.819390156322599 0.006024722631425 3.437790326686629 C 8.593530880320648 1.709498254393013 3.422419425676220 Si 8.564135500809043 0.002300317029907 5.127130361944188 C 6.823009404622984 1.732442182857221 5.151907187260850 C 10.298839904237681 0.029420476103816 3.451507195310336 C 12.000346781669485 1.668428381047820 3.404235195077474 C 11.987855510733532 0.022983183575563 5.159639616088350 C 10.264039958914793 1.726129252023884 5.144822416116067 C 13.675063710102297 0.041295241873109 3.436953920459293 C 15.405644988662401 1.703646754617349 3.379244768860851 C 15.394010858003540 0.012901693324309 5.133735102949307 C 13.701127422798228 1.716904544107444 5.148374912267981 C 0.061358417729269 3.452044820791919 3.425225734352764 C 1.695189094809287 5.154956244334572 3.429676805905700 Si 1.708808547127944 3.429875261394250 5.161517158680681 C 0.056910762260293 5.152554953654681 5.167504928308854 Si 3.406673250627667 3.381653566729192 3.428517808423161 C 5.102464629321846 5.127217801927479 3.446311062703878 C 5.139841264913072 3.476227993117495 5.135988710533441 Si 3.442951382281169 5.115686585097175 5.185904142497739 C 6.843833928928299 3.443777063979642 3.408701295905888 C 8.581966626835802 5.154648834959325 3.423906561464342 C 8.590774479694154 3.418485783017029 5.141178383023551 C 6.838229980537459 5.137493874543399 5.132972641819264 C 10.227339075571154 3.406118628772339 3.390064616894647 Si 11.996009935129811 5.161558194050257 3.383604958645063 Si 11.980143344780869 3.393620409709168 5.148519406225689 Si 10.312217222984151 5.129963950834296 5.157217019300244 Si 13.694861431192507 3.430180948470735 3.466297846135329 C 15.424457823278766 5.155235721002464 3.397810733215828 Si 15.400782828834355 3.400867935715563 5.117800917385779 Si 13.684798489521233 5.133114905981461 5.130164853146264 C 0.006219528488723 6.848967334186527 3.401127396728680 Si 1.741895269112908 8.536526122710393 3.408550804355772 C 1.746902594560139 6.901955064629971 5.181026340792323 Si 0.000626648318605 8.564158689071794 5.165222261758636 C 3.428244204741925 6.796902967505514 3.453099851680203 C 5.154812058114516 8.568994515357954 3.422419827189577 C 5.140108317381560 6.827428806871419 5.147878378202569 C 3.401797449161933 8.557173616496225 5.110266168359257 Si 6.872178236821326 6.817629410169070 3.441576419478626 C 8.549980065425000 8.549922720768890 3.449725015048154 Si 8.568138481620599 6.851606299382969 5.108957361237211 C 6.855190940956776 8.564023529661014 5.108547293496660 Si 10.311004643187118 6.858394823610046 3.428186884572573 Si 11.972194702246597 8.562907750776784 3.444921666616029 C 11.945977602030318 6.873109588274794 5.168568773507463 C 10.312956188436827 8.539275798599567 5.107755650559930 C 13.685533435979565 6.881810393172604 3.453210611830751 Si 15.415643724556791 8.530388858743780 3.459907378661695 Si 15.412996065538515 6.884558941056578 5.127304141780782 C 13.707044944826649 8.568708722394735 5.139143563000913 C 0.003346161529570 10.252871053252660 3.433086433258862 Si 1.710459700161709 12.000390727109213 3.464737405366266 Si 1.733249250100451 10.260368132979057 5.159571888952786 Si 0.040373273122418 12.018721699697563 5.172777407553009 C 3.391964034902054 10.254796272670822 3.436271058513368 C 5.135049856767259 12.003139642695983 3.459626728111264 Si 5.150466306471661 10.259252259984528 5.167212607197523 Si 3.410618792312202 11.958954115816860 5.106572675035779 C 6.888323394455169 10.292378958562734 3.429125509665804 Si 8.543546965531840 11.998768272586144 3.406220175979741 C 8.544135731720282 10.311592789757324 5.111671852781167 C 6.849649365794703 11.985158521329133 5.148037083975602 Si 10.253698867503749 10.264805604380774 3.408735855805500 Si 11.970446298902665 12.019186112010559 3.398892883565609 Si 11.991524302601603 10.284639699803183 5.107016908341429 Si 10.300861991504382 11.993544848225561 5.177300737651453 Si 13.729230884193589 10.261841913902266 3.468207169602334 C 15.414289164656241 12.015183747189697 3.444967182742297 Si 15.420824269240345 10.295615226009769 5.133551033926159 Si 13.674225782503465 11.958846683273107 5.143326892667625 C 0.037517144523483 13.675591383694634 3.402217950884516 C 1.682104804879697 15.411075052163261 3.449529902013849 C 1.733619332609995 13.689306204109535 5.142104698550860 Si 0.029511344890561 15.429898742135309 5.170932551922187 C 3.452499802882011 13.727307950416641 3.371734317043488 C 5.154925144191861 15.436645980067560 3.428803373829703 C 5.123530126255736 13.716044568885344 5.141238224482632 C 3.413448824389446 15.434305133777920 5.135611831113184 C 6.827322803379618 13.682577287909590 3.469269747768561 Si 8.573604340528494 15.441516599690297 3.441262027647107 Si 8.531269982848798 13.683683060013806 5.126799686623309 Si 6.828697162464725 15.440248012842947 5.140266692007962 C 10.311506901852541 13.723276187885686 3.404098258261795 Si 11.958852717488762 15.402454013200140 3.452991166972040 C 12.016852479372439 13.725187184317489 5.139726584426490 C 10.293184363658392 15.391555219707206 5.174080137715885 C 13.713444701952300 13.683870055922139 3.480545612989371 Si 15.435673437801507 15.390033399351069 3.438137655982630 Si 15.410136906939107 13.702740697948188 5.137693549680158 C 13.728583379281909 15.393770626384775 5.144953661515681 C 0.031244114968916 0.011705242278352 6.796401090104712 Si 1.760595260560428 1.752869192487442 6.884226324887686 Si 1.716155463869468 0.008108333607140 8.556285843548981 Si 0.024425382559809 1.700086302798773 8.540469369663505 Si 3.422146064790178 0.027677504679258 6.843510638023395 Si 5.165914030737347 1.701740480694734 6.845043023075870 C 5.172797093868488 0.001986386955414 8.593851377322862 C 3.398318665947548 1.708042881850027 8.577247094056856 C 6.863735950055475 0.026762123818168 6.826311793153446 C 8.539311016133395 1.711233331235137 6.900051974744600 Si 8.596175635182673 0.005017326584950 8.577899194344972 C 6.846658630075569 1.696712664500980 8.547450989804981 Si 10.260688232797774 0.020517744531001 6.869164703282827 C 11.996137977683803 1.736663517084195 6.852552702096422 Si 12.028998896939116 0.022878868697908 8.572508717968509 Si 10.283588107357671 1.722414755629995 8.558327066817220 Si 13.708411294627506 0.019120200219487 6.882464592541707 C 15.448209748185977 1.671898954185639 6.834169032924089 C 15.449232183385714 0.032065804889086 8.537139754711976 C 13.708291265067551 1.683649319767800 8.548495822363856 Si 0.004334389722332 3.453067973323122 6.804853556523195 C 1.693881576187243 5.159970082925579 6.861488852138977 Si 1.682456884895925 3.401662679256956 8.554702612474587 C 0.002260265098703 5.177419744617649 8.556708243858060 Si 3.398754216968476 3.441528618389084 6.877837518379171 C 5.112442744548567 5.146655006418820 6.866322290369620 C 5.139778828552509 3.395904016550857 8.596286329301522 Si 3.397872453738705 5.136805533609780 8.557169297927210 C 6.834230304873840 3.443675070140325 6.819555140625446 C 8.548919001299216 5.157753285234486 6.805023712870984 Si 8.586251056159023 3.386649532884788 8.551847303092673 Si 6.860240910122091 5.155524773188694 8.562177580880553 C 10.269760559472324 3.486899467220821 6.838736916392486 C 12.001195605432800 5.124728065310729 6.897989026436800 Si 11.989881625241269 3.412596188070518 8.564748125921534 C 10.307814600127365 5.135569497252416 8.546613959581203 Si 13.689052127859926 3.404788189872147 6.827853068061199 Si 15.398696078506145 5.106303337969329 6.803401878398547 Si 15.391519959940634 3.431209477686657 8.564104494613529 Si 13.685819429628976 5.107107194959631 8.576108061383444 C 0.002751029977077 6.885662577035816 6.854774781909931 C 1.763528144039522 8.541644232185744 6.873885758859222 Si 1.681966812557517 6.831289370614641 8.571612184335265 C 0.004043331145746 8.532919166379621 8.554279174864153 C 3.421327972987649 6.823491750942636 6.885158694729688 C 5.132571166361652 8.550236272261104 6.841149856376654 Si 5.108529708736961 6.826773916528492 8.587990466088344 C 3.407382386907234 8.560043156114508 8.599429733405900 C 6.852231140444677 6.837953993964039 6.819905713667292 Si 8.580663839022108 8.556168503496092 6.844941759325155 Si 8.534918663077367 6.819568891568228 8.545107717518484 Si 6.901668813641422 8.576595782919945 8.590508141112206 Si 10.268696525583765 6.852710949706093 6.786840421113516 C 11.994830995832713 8.559579750015432 6.899857658882178 C 12.014521884687863 6.835749588878250 8.515889658532082 Si 10.280592773737178 8.561119795844032 8.586205834423721 C 13.681533363617504 6.829151518376582 6.792072126440388 C 15.397353214632346 8.556555010507553 6.835498235066673 Si 15.426024492310587 6.864433441055536 8.540572782733451 C 13.751213821090381 8.557243397060054 8.564529588496580 C 0.034037254417902 10.297628600905684 6.849201312916210 C 1.713946559600477 11.964528685063287 6.883533374028348 Si 1.725124374988518 10.256633968829972 8.573067875114708 Si 0.003526836088583 12.019685679962908 8.551003007369792 C 3.428448561086010 10.266547663929332 6.853919464839910 Si 5.144134314262705 12.003575806993602 6.820438590395291 Si 5.133997196228014 10.276750360452636 8.572519359859189 C 3.406341522532306 12.020009120781534 8.588837395441976 C 6.863172494749045 10.257751195272007 6.848919639832064 Si 8.596342195356161 11.968678887866870 6.856212067205592 C 8.551225727294264 10.291534617609191 8.576299440747130 Si 6.885481886759468 12.005756536833070 8.523979135469018 C 10.287603526031806 10.306117257649097 6.850413447468926 Si 11.969363523819766 11.994637215569380 6.885715724971960 Si 11.963853553867397 10.283881287301458 8.575606685065523 C 10.313149536231295 12.002833601130323 8.533676781357078 C 13.701713900716031 10.271643554019693 6.859885743333709 Si 15.440216191080946 11.988674086472273 6.850030735397536 C 15.445024248003552 10.282562949272378 8.615403814436350 Si 13.670852671328385 11.957676430121657 8.575048215605960 C 0.044312767164973 13.675543978242407 6.833952533759441 Si 1.683036903066020 15.384112154776968 6.795916874448027 Si 1.692449859797915 13.677028196382658 8.532465154009536 C 0.032174200838875 15.450638439959654 8.549038812263037 Si 3.436148688546609 13.697337542433273 6.820225099438173 C 5.136736929144337 15.410953112779925 6.856456519310020 C 5.115338275391922 13.719126960661166 8.568551517251425 Si 3.417089100347589 15.438388993530355 8.556896172776550 C 6.886038075580211 13.738654930291526 6.866057541073427 Si 8.574272285969572 15.404280604361151 6.851308974836494 Si 8.582176779005160 13.683735268085451 8.565430809030479 Si 6.838004839013413 15.432718987197747 8.533858483374974 C 10.302286606099134 13.692440323370720 6.879125927746308 Si 11.995367686896120 15.436971476396280 6.844431416607391 C 12.025567679109272 13.737804581553673 8.604418130532478 Si 10.308355327885396 15.400974490255297 8.535002714489819 Si 13.687646898505596 13.709345056928420 6.864496276056159 C 15.385495150888383 15.428209885570789 6.821469847302230 Si 15.409421452594318 13.720882684839994 8.537151793874955 C 13.677839769532575 15.433797793529518 8.579784187279502 Si 0.007722141150077 0.022865079486127 10.324386606540715 Si 1.711041312994917 1.697263078011295 10.268176323236263 C 1.732898906470337 0.015064748829427 12.002395125025346 Si 0.028332401819749 1.701057564629545 11.987529588911176 Si 3.423385977899355 0.025133763227930 10.271334966232427 Si 5.105415418275439 1.679708036370070 10.284632533194552 C 5.144504567507180 0.007608766669657 11.986422702145020 Si 3.428608700328721 1.701522660222730 12.017677617224896 C 6.869739993182310 0.007766365620281 10.316062671485145 Si 8.579268585839385 1.674905634707784 10.324859195660853 Si 8.509460508943034 0.014889746019464 11.962741902009215 Si 6.869135918073572 1.687631476839447 12.018545208106907 Si 10.253005276657033 0.019640949210634 10.273540748601082 C 11.984920853806761 1.716953126463992 10.223570822417290 C 11.999040540768544 0.024332817454128 11.966312948114309 Si 10.249890219973643 1.740540462905770 11.995735275960085 Si 13.697809509076670 0.033571373649095 10.296934736627490 Si 15.438579094057365 1.708843936625204 10.290291896463074 C 15.399660049257575 0.018974041631234 11.970757406969662 C 13.700849763440942 1.720047595942735 11.983735824029054 C 0.011469146750493 3.383533452502580 10.232929105500189 Si 1.716105620537836 5.166166669034126 10.307881840171014 Si 1.654055518826558 3.397349553470601 12.021808056951006 Si 0.040042630932216 5.155981596097366 11.995628952500509 Si 3.384865910329010 3.448760991952288 10.272769907760390 Si 5.142062671003096 5.107485146837673 10.308019612837510 Si 5.127151383624798 3.400824959056662 11.969505954217095 C 3.426410287875041 5.170538747150138 12.036765589361108 Si 6.841623046885687 3.456077205539293 10.259831626979881 Si 8.574334178013469 5.172615352014042 10.305125510703965 C 8.580999188325801 3.362943802830000 12.023412775091176 Si 6.863889278064152 5.168549461374549 11.960972052748986 C 10.312334496721197 3.422563992954480 10.257779684724481 C 12.014787256135449 5.141838108922114 10.283334482234721 C 12.003122422178089 3.392340813901704 12.008157991790618 Si 10.240565979570126 5.120671494406225 11.976814213438962 Si 13.683192597833829 3.451282114706384 10.247290360871016 Si 15.405914316112085 5.107595532938883 10.311541887508495 C 15.433385588704622 3.404782018012609 12.007069385066851 C 13.689250138288099 5.122939978532179 12.014377565327434 C 0.012050772133580 6.857449859332752 10.297480896612479 Si 1.723459734820292 8.576820542644841 10.249981989801798 C 1.718864064273230 6.837213317864156 11.963974524776448 C 0.020165386576579 8.508756331599265 11.974325004422766 C 3.420493276086066 6.853241151515878 10.244661705703107 Si 5.146430205346805 8.564515361089899 10.272627079065135 C 5.154898942959381 6.806861851607360 11.964293862573459 C 3.397724748162045 8.559804197357037 12.033597285378535 Si 6.876071732246294 6.838353003682313 10.294292215715609 C 8.561855170899070 8.589021308242351 10.257707137538450 Si 8.563999738012301 6.856535419657276 11.958989214991517 Si 6.842601319860714 8.579969051478285 11.992570741880899 C 10.271362862141503 6.864823633100899 10.286455078966142 C 11.986633818861272 8.581677370105226 10.266643209523862 Si 12.021236076973869 6.841426809149833 11.991006263362538 C 10.289328287164382 8.537536566263944 11.981793397170629 C 13.737904439005325 6.827034221166357 10.285192346610476 Si 15.412836895355552 8.557198277837998 10.286184766844112 Si 15.411153033359207 6.844101392587238 11.965019674426026 C 13.724159080448901 8.546920091831986 11.959871737911188 Si 0.032349395929453 10.252601901442656 10.285031913956002 Si 1.734972689105616 11.998043998273968 10.241644896125818 Si 1.739580755644248 10.289181079170037 11.956737870568171 Si 0.007805988565278 11.938900639381160 11.995552641400259 C 3.377439701109950 10.300641241188792 10.332912631184177 Si 5.150703259465432 12.025326105015154 10.295426026793459 C 5.110098255511625 10.309763806124346 12.010512153670961 C 3.474814531523844 11.961691642113321 12.048552943026689 Si 6.881562000645796 10.314152240260485 10.276661108366294 Si 8.550472674861124 11.964827115295394 10.286300616725407 Si 8.593391865529751 10.280547259914830 11.964019727488134 Si 6.819741239692082 12.030463463008038 11.984853935903935 Si 10.268653315949807 10.281671963806211 10.301403430440843 Si 11.969700703858745 11.969230608903429 10.285224754044240 C 11.970030914276638 10.287524914270337 12.001814035879319 C 10.281413963534428 11.974963266471603 12.005041012074033 Si 13.687724167796766 10.300637282851397 10.291105600470930 Si 15.404615266909321 12.000176064135783 10.269477253451361 C 15.416484462481836 10.299323875434050 12.010545665420024 Si 13.711825709323087 12.019678382753028 11.999913028753539 Si 0.018620139194708 13.722625005619022 10.264606932268785 C 1.682906331158394 15.418634626049249 10.251059591210970 C 1.689176555575910 13.731789066595988 11.977420339048942 Si 0.005871449147941 15.417284875854831 11.963400705692624 Si 3.464886830177321 13.706142956067275 10.259711184701494 Si 5.132120168662970 15.414080050577059 10.246704555646392 C 5.106087908569717 13.736624235173524 11.994037226749304 Si 3.412114430481429 15.405462231050594 11.983481036982816 Si 6.787847648911542 13.735921783599336 10.287158441635215 Si 8.578913604494639 15.420264978830394 10.297090076986720 Si 8.548718355185548 13.734564146813970 11.976714966163595 C 6.840519231307730 15.440153352079088 12.027106786572681 Si 10.301419359937457 13.745421548797975 10.242522088822643 C 11.994757333856255 15.442639591868817 10.266262972959110 C 11.987222865548794 13.706304115535673 12.001928668874145 Si 10.294475261075990 15.412414014442039 11.968039356801830 Si 13.694714560023527 13.705583606092173 10.248746454703713 Si 15.411343586086030 15.386710570388525 10.259246214036676 Si 15.389914092868514 13.675748284478340 11.978048068703227 C 13.760709632554169 15.446776015444449 12.020290676795778 C 0.005326769647624 0.007001184078692 13.749637622108482 C 1.738610084265624 1.708655644893513 13.688155983719950 Si 1.662566382863071 0.024678426375943 15.422414915218374 C 0.019880111223673 1.710390549058240 15.408676191257012 C 3.455963468551609 0.023448210079538 13.727892974969874 Si 5.116390683164944 1.719221711139724 13.698245006794973 C 5.094156438969417 0.028854582503273 15.442408337459254 C 3.417371522811035 1.709761511504157 15.414327415694858 C 6.844408449470484 0.032684550730556 13.695210363108609 C 8.569730904984809 1.745737222919923 13.655172864910986 C 8.536077152614254 0.033682921672468 15.383703061717725 C 6.862391928825895 1.702412159299320 15.403167742541418 C 10.275687183074034 0.001724116499147 13.715785588237205 C 11.970854215558433 1.756671149428049 13.665687161831128 Si 12.005665925276345 0.011656100406678 15.433375117426857 Si 10.265801230402953 1.660200486717138 15.390927428385844 C 13.682208536632595 0.003949478355506 13.686155606101865 C 15.413169576556887 1.718075267903222 13.700111211856861 Si 15.418576626090143 0.023433875934000 15.392411655024162 C 13.684844685268285 1.722155222037596 15.358604703417670 C 0.019457368504541 3.447558036183403 13.713178803465841 C 1.746395207920508 5.122685222107638 13.707829531470935 C 1.715354202932119 3.409551798021685 15.432110011754627 Si 0.030797581493404 5.139413847505574 15.407225477722191 Si 3.395713376083376 3.454360297361219 13.730987744075087 Si 5.159963887239451 5.158084220759686 13.675880395924970 C 5.138757470357105 3.415267467103763 15.431900116205767 Si 3.429366800625039 5.173381108880482 15.443398822336937 Si 6.832055512920603 3.443626797026264 13.723894816523329 C 8.547473844326211 5.125826084017360 13.728885075868453 C 8.595189225297052 3.385017378705319 15.407821815503839 Si 6.885409944834595 5.168853277922309 15.393596716239365 C 10.266583133834242 3.403586934096110 13.672906735965594 Si 11.985452962743711 5.168978435553260 13.733985974663989 Si 11.998105196284142 3.393010100420303 15.412479733171159 Si 10.263328505552700 5.159044012441663 15.375936846291298 C 13.661786219035815 3.405395690673487 13.689895300811926 Si 15.419034673445841 5.136802960781098 13.711819692481800 C 15.424298647768296 3.411037345235115 15.414252210042218 C 13.718098383891617 5.128696499372324 15.449441681776189 C 0.001830062918557 6.827955691125031 13.721755764968805 C 1.726409000059136 8.554522328714331 13.723611528968570 C 1.675757995393031 6.838654738594720 15.420871990533477 C 0.033370661780949 8.595721105716242 15.410516333132231 C 3.390401197040169 6.860373585882672 13.723768788756789 Si 5.163915889617707 8.548025527650271 13.688034395548149 Si 5.119491407763420 6.848827367760141 15.412566710400048 C 3.414106659152368 8.570592001960097 15.448776221061257 Si 6.851239681801220 6.848943566674589 13.743375475801628 Si 8.565848558786108 8.535699889257240 13.689212533338530 C 8.572900285938307 6.886093678433534 15.419117595424130 Si 6.829422855701207 8.587778780122640 15.415490002743919 C 10.312628909363804 6.825654387577644 13.700670979295344 Si 11.979160696966829 8.538865631708319 13.676216092119107 Si 11.962262250652865 6.796419014694058 15.404144829988708 C 10.224004857574460 8.551480439558011 15.400776555509401 C 13.722892965396188 6.874300907375060 13.737375464737910 C 15.419355450070697 8.588553608369372 13.683347342486684 Si 15.378249220108815 6.819757659636203 15.389855695453662 Si 13.736033027059365 8.567588921407557 15.448034484503795 Si 0.006041450351789 10.247376166058149 13.711422180341687 C 1.720631494445681 11.992007190631217 13.650439742257042 C 1.711498077980744 10.280413251303868 15.402127411124367 Si 0.032713229770848 12.013086410798035 15.414142493895774 Si 3.464080394075867 10.259889399428321 13.687753706826298 C 5.095655479802114 11.982554951437983 13.688112527569649 C 5.169183515568743 10.288240872203678 15.412795257887769 C 3.433752161328955 11.984215623246969 15.450135053714101 Si 6.821989159293626 10.300255162378479 13.686832836535508 Si 8.551545968347821 12.004100508698103 13.678654917492070 Si 8.594583205161891 10.258701796497309 15.426188348651655 C 6.857040813692467 12.011857826289670 15.416926475442574 C 10.294972538101065 10.312334727317060 13.725047744903057 C 11.968475859154216 12.014280975497041 13.723567279673738 C 11.975776024350047 10.289810606236651 15.422306590811660 C 10.239737100778665 11.973840126704877 15.421434157604333 Si 13.731636645019400 10.300841883632341 13.677840254651002 C 15.430323415977639 11.981721888174718 13.734666065191576 C 15.385712857203366 10.244652299227949 15.397079021154155 C 13.698091783707214 12.012737303541991 15.419055451824461 Si 0.031818974403335 13.726617344487844 13.689119487545948 C 1.699517998195591 15.401333131451363 13.722944048051849 Si 1.734776617255813 13.689055340033308 15.405882316068965 Si 0.019581534776630 15.400316619716548 15.411349278014365 C 3.359524756389986 13.697541752378999 13.713603827919757 C 5.122216768660263 15.374311918788381 13.712703286718968 Si 5.111266434406634 13.736344523552640 15.411579864410857 C 3.447183090977094 15.396474342167872 15.419764421271710 Si 6.839543845507120 13.708753291441878 13.664050646988308 Si 8.531756503029287 15.408934400585327 13.692435020084419 C 8.544329539081497 13.723883826157662 15.397793378729844 Si 6.892958002670143 15.439865060540694 15.422947244660483 C 10.277974452648293 13.723168038181008 13.703329349413337 C 12.015291803934605 15.450603728281797 13.677481268853533 Si 11.939849873687089 13.696024066468558 15.422724724101291 Si 10.264696729619315 15.446808174098351 15.443731418160842 C 13.723181733373465 13.731872326633200 13.685408511140089 Si 15.405516191276599 15.402060348814132 13.708328602820997 Si 15.404448542662713 13.675669180552070 15.392873864838197 Si 13.686943992324760 15.426896193985581 15.421753942851357