500 C 0.027012095476707 0.046577198186689 0.003906183970545 Si 1.741214001839025 1.767640779773958 0.032350476750649 Si 1.770243137143707 0.020040350729122 1.770640355806663 Si 0.030024330668223 1.768440081458628 1.689589274656929 C 3.520734935833570 0.037520448362505 0.040964722766214 C 5.270887074222951 1.782123614339500 0.005498349591980 C 5.248007853949932 0.032807034331102 1.700207496150503 C 3.536355862344910 1.766714613801839 1.761751631838422 C 7.047876831697157 0.019395054299847 0.018176033832680 C 8.750099497940084 1.768699089829246 0.045125681209222 C 8.789505086231570 0.011436653079998 1.738436475615769 Si 7.030337724766863 1.792567405494474 1.784031686233160 Si 10.525011974155063 0.002227281014361 0.033879385982535 C 12.302217016064821 1.782714780884662 0.038589369245518 C 12.316728122667870 0.021415699156596 1.799372706191493 C 10.521111042656317 1.762156112696353 1.781903748132271 Si 14.093484750340576 0.021216842297939 0.038522448646701 Si 15.845656833338735 1.770336212115811 0.034784410086347 Si 15.823381294247861 0.001810692839202 1.723651593936578 C 14.040281006425614 1.766948057783019 1.774179619222882 C 0.044013337951922 3.499301667366412 0.014010457823713 C 1.805772622641016 5.274807785006589 0.023670322750876 Si 1.772388856513354 3.551927496045429 1.769467641212882 Si 0.034054440955702 5.248494167972026 1.792391974600629 C 3.526331016336575 3.556539583256526 0.003213052605973 Si 5.277047041585003 5.260100053972073 0.004540813532727 Si 5.256282284629901 3.520964100824754 1.726047290361700 Si 3.522788597498048 5.255117435098281 1.786928306082821 Si 7.036886698290717 3.508719808414783 0.030527389152073 Si 8.763149192468868 5.300362184007645 0.010928318981792 C 8.795857729808263 3.519110868530138 1.730634555212449 C 7.012624089620128 5.275074823344739 1.810354134424012 C 10.548236467146868 3.492194430831814 0.020415144032543 C 12.362668108056315 5.217560976202003 0.031811743736637 Si 12.350547020710097 3.486400833903010 1.792215300727837 Si 10.572053455788222 5.270709672464187 1.802874767056327 C 14.087796217000289 3.519181642479752 0.017522780611002 Si 15.794404119614718 5.244073726886353 0.007249161411948 Si 15.802784514597898 3.510579942339118 1.785784970747654 C 14.035665989826695 5.252807054375992 1.819848860094169 C 0.010816041084022 7.095895741916716 0.028982967375577 C 1.725382910814911 8.786017040292215 0.033511667597642 C 1.795342856495845 7.033848368381491 1.755774868467542 Si 0.029620251273195 8.776268846341541 1.759886968004089 Si 3.535387409500933 7.065621199488294 0.007722170968694 C 5.316991801988782 8.837346549408425 0.017684326132677 Si 5.296509755169894 7.062409286851949 1.748889981917672 C 3.524673455844090 8.783697196581340 1.737425326215189 Si 7.058650596913121 7.028315609743103 0.027711894566923 C 8.787239579983016 8.838561109951026 0.011060529367376 Si 8.758830546025440 7.019044206424717 1.759855782098385 Si 7.006833717124928 8.796087840666225 1.778093320077521 Si 10.516355838451320 7.018776287059797 0.028274009019933 Si 12.281114510877918 8.761107922078457 0.026974210451970 Si 12.311060714658705 7.003485401778492 1.732533349608032 C 10.584176722413865 8.772700575009132 1.785219140284157 C 14.119132002203409 7.037719212480923 0.014873148739914 Si 15.851208666008930 8.792225473631014 0.020947598805669 Si 15.808424909392951 7.017862144285036 1.777480750910053 C 14.043428816218279 8.832640069491115 1.737227026550426 Si 0.027608244232954 10.548640439353481 0.006944756355433 Si 1.760311343384237 12.289690595505816 0.028283926064423 Si 1.785290570617847 10.528241637857104 1.777153975254806 Si 0.008298792957183 12.306536461785793 1.764350252114144 Si 3.493210314602528 10.529523677600293 0.026437615414081 C 5.292780993039037 12.275338499646365 0.039920573027637 Si 5.272502256317475 10.570234096252474 1.741176799609892 C 3.489836577660573 12.270342503995691 1.731183862809313 Si 7.039121055164464 10.526699746081945 0.031779289499084 C 8.788393611621450 12.300466503377470 0.023732141344956 C 8.817836304199021 10.583719003068653 1.711656911520891 Si 7.054710054385253 12.327487073985452 1.754280366193391 Si 10.542513478251964 10.524195576349864 0.008361188680244 C 12.320568071770934 12.315812060738315 0.024660035495838 Si 12.287667351966723 10.534557814222461 1.738821997172718 C 10.531900794471484 12.256889143919038 1.775433298885922 C 14.082016624053317 10.529002563890039 0.010839190278015 Si 15.853807407287677 12.281804353296897 0.014211936812797 Si 15.797598115531795 10.574470716927554 1.741942060376254 Si 14.070545311441062 12.296216948401943 1.782847808133414 C 0.016806671914675 14.109700301411557 0.037983865578968 Si 1.760684188435191 15.852601740960269 0.032609299288594 Si 1.775282354496954 14.041812585311503 1.790669950955360 C 0.033637759532632 15.802370529456754 1.791295897112359 Si 3.487919009061974 14.020927492825653 0.017298925293189 C 5.229535131169604 15.807762615000248 0.025775756174202 Si 5.270451133780485 14.048787125704465 1.737287942656985 C 3.526244776482149 15.856927236976437 1.744616646904273 C 7.071709982477383 14.039818992359296 0.019939753985021 Si 8.822484019454372 15.797769809448603 0.060454136923494 C 8.839345335887357 14.047875594759191 1.780376823936522 C 7.007565779748638 15.771469852587835 1.804645312167879 Si 10.538956877085150 14.093887463600669 0.001931874029910 C 12.363124366554450 15.861438562608605 0.052190497504811 Si 12.294120427748995 14.023287043047668 1.779283019085699 Si 10.554918713696111 15.837916681958644 1.773418248876400 C 14.058249430365933 14.109824101207410 0.028803090878817 C 15.797126649692359 15.856641229856455 0.002173447084975 C 15.850020135387860 14.083131809836173 1.772509406523532 C 14.117717560458409 15.822470622158272 1.724603463697165 Si 0.021011117955011 0.003293264953975 3.484873701756754 Si 1.738323532088079 1.786505724395286 3.534521798831916 Si 1.720734996015514 0.032018683191429 5.278367614314216 C 0.052065734642661 1.774079430646814 5.282715238805758 Si 3.524165431690760 0.007982369605837 3.516826757615378 Si 5.242571526204617 1.731096586078560 3.535513913104275 Si 5.330668983015632 0.014543308301831 5.302957404710774 C 3.518262333067383 1.792533595949394 5.277077431422550 C 7.036289508895490 0.007394487112437 3.559765939542307 C 8.835411919349768 1.790151626887731 3.573402382065487 Si 8.790411628916596 0.028666089165459 5.245443134894533 C 7.048191955664920 1.789635515974253 5.306598353195780 Si 10.533696596749122 0.000266730745645 3.538579737226290 C 12.350463287632513 1.714008099535012 3.491596230828175 C 12.352622030828316 0.014620326389604 5.214199684443607 Si 10.583706015637430 1.786198939100382 5.296855490655425 Si 14.032347613073188 0.036005426391439 3.510851805440534 C 15.853774368612946 1.785323996280229 3.549036287077670 C 15.841959535324897 0.021161135144083 5.253499584163208 Si 14.084799240531932 1.776330950164851 5.270413782110995 C 0.001692735653625 3.508492730065828 3.531126472139682 C 1.770021945835461 5.268824355552328 3.503139784521233 C 1.746740344747350 3.518888848664651 5.287689579119657 C 0.030278194911530 5.274692359379726 5.272148448231759 C 3.516259235142695 3.497009779134824 3.552622310082223 C 5.235574809268620 5.290444402618518 3.493107025665410 C 5.266942897954853 3.545084897463462 5.273748978685393 Si 3.505676423721909 5.306997206337136 5.284373656267393 C 6.997037202957832 3.492591125801290 3.513400645360207 C 8.828226617268033 5.325728070194960 3.520870873891503 Si 8.793821164440423 3.511695448832957 5.264853619870337 C 7.033901592733459 5.226834981256027 5.306421838212848 C 10.509395229998237 3.553300445563888 3.515764823555260 Si 12.291337727189395 5.247810542207049 3.505457348541527 C 12.351103264830988 3.506708327780893 5.238986812319549 C 10.548196576227715 5.308439223309894 5.258394887745000 Si 14.054144558210938 3.512568884175164 3.548825787165079 Si 15.847658189504232 5.245724139400617 3.541683612979075 Si 15.822259879091844 3.516010064206453 5.292594796476898 Si 14.064323513822096 5.281291663852572 5.321956543584345 Si 0.026375623674318 7.009017235614663 3.543265310390082 Si 1.743461079594435 8.756898188984248 3.508977863835829 C 1.762996958032979 7.051940662898966 5.259907625057688 C 0.041537977011280 8.767791948951373 5.267666709270570 C 3.485128362955943 7.038826874277573 3.515329252101066 Si 5.277230955444936 8.764343267618049 3.506550109755907 C 5.280049661629070 6.994911063980323 5.254556355500235 C 3.486413688596276 8.800083772058175 5.231605238920769 C 7.097372913226994 7.022598743940443 3.502369236288057 Si 8.810177740945402 8.825368505179323 3.495416155199107 Si 8.778628370373434 7.041509357938618 5.266594847804382 Si 7.043645427309147 8.772059196527691 5.238578604466936 Si 10.552843692572049 7.028340633911999 3.541309413083903 Si 12.306702598150210 8.773385009772401 3.516746053556581 Si 12.295891035460718 7.037960663515204 5.250059690945015 Si 10.527485288143593 8.778644202015283 5.299833739864077 Si 14.068085272265668 6.988619091343383 3.543174808619852 Si 15.833623768711796 8.782563496731790 3.519070935456829 C 15.859162658350265 7.067404010258240 5.284995772715975 Si 14.082070662922236 8.759076523903667 5.245679177662624 C 0.017544926598804 10.525622006356475 3.484385893100448 Si 1.752739622868333 12.325434696429724 3.540578402110921 C 1.801273999192456 10.521045634606750 5.288501959380882 Si 0.001252863957425 12.247335836790713 5.265399325594070 C 3.540161789626484 10.579671824971820 3.518118844770060 C 5.323588917679631 12.336008332194572 3.495509149438361 C 5.305564931827876 10.498806061577556 5.295481890828587 Si 3.498915038252933 12.344579277562081 5.231879326099047 C 7.026687630635220 10.507385254551210 3.557193037181804 Si 8.759931354983188 12.313556774597691 3.540636789852718 Si 8.755695859160715 10.538467258817121 5.265259909242402 Si 7.011928612855349 12.295835146457554 5.242674917674949 C 10.511888420082075 10.531961328929388 3.519835826238302 Si 12.305084584203954 12.280798574820599 3.522938775134756 Si 12.321337638382742 10.575209525114628 5.288094560383537 Si 10.556749508777141 12.293513574456908 5.240699800548328 Si 14.123259888346062 10.553357098749355 3.531615311072955 C 15.813495003915799 12.280274910163170 3.515034619503542 Si 15.818330126186897 10.580503197650543 5.294886307779153 C 14.072647136172495 12.325871691072591 5.279423175532836 C 0.047645328816735 14.107763044023226 3.508112239679925 C 1.783892765977966 15.798093524235288 3.543050586718659 C 1.705809963606560 14.034956934590040 5.275752012742286 C 0.037520786142657 15.792814290482514 5.252324713213366 C 3.556891811924740 14.101934903989562 3.491095918636658 Si 5.269485577225979 15.861690998805111 3.548554772803072 Si 5.289971750797343 14.063621347024638 5.306671561446930 C 3.501104667932816 15.841178660025541 5.256053343680793 Si 7.011136521918321 14.100024870353620 3.544992517098288 C 8.758290190209790 15.844250817997105 3.505104231346526 Si 8.817636108364313 14.086762304110312 5.284221131600082 C 7.019762280542856 15.814369985725341 5.286765444443772 C 10.546617572632298 14.101855989353940 3.529081572242625 Si 12.323082157847102 15.844840300273040 3.499827643640535 C 12.373832073939806 14.068160509173429 5.279516803685813 Si 10.586113859594892 15.823665290171162 5.287357343012213 Si 14.076506346609744 14.033292778032598 3.510253983547316 C 15.828618621443997 15.848776660024292 3.531253277137959 Si 15.808490792998086 14.053732049524594 5.256553514145429 C 14.080480113689292 15.843270317489457 5.291871395207441 Si 0.036558960748886 0.006252548625362 7.002119126703902 C 1.728200986726228 1.776959930503011 7.027156248155195 C 1.727076907825819 0.004192846629307 8.743251822381350 C 0.003546913606756 1.782609824345193 8.726356124694624 Si 3.515176874472697 0.047173467261864 7.043577041969950 Si 5.304477224105051 1.777179039434925 7.053584271669180 C 5.307387921567996 0.025749313938232 8.740187983090806 C 3.535620561553464 1.727535408579261 8.816334467199267 Si 7.021605255097426 0.023112685108451 7.052375848228565 Si 8.804567823510636 1.760805915377385 7.046168036749315 Si 8.778726979185315 0.004098523134595 8.819197869689459 C 7.054420995306453 1.741493892633871 8.780243295313994 Si 10.583897523669950 0.034955951009951 7.055939769297964 C 12.282912392176602 1.719673161281369 7.003306288739500 Si 12.274863565465324 0.020535979994226 8.730534284843301 Si 10.574540250860837 1.759447384589487 8.771903497743988 C 14.070202872325273 0.025613674010642 7.016729365963289 Si 15.786821826913414 1.758164630791397 7.039019565319209 C 15.768558305575196 0.031423966802929 8.791933085063899 C 14.073121315580654 1.758052671565104 8.819295718318896 C 0.005956105475677 3.528922119443483 6.985199635127965 Si 1.751732845268768 5.255367940520097 7.054212587112597 Si 1.747649467189601 3.529496498791309 8.816219165615415 C 0.040054485793541 5.294325712270068 8.750887460717966 C 3.488673135539393 3.511049704198322 7.008906707368456 Si 5.295241248696625 5.260842769016922 7.057894107846653 Si 5.272216535052038 3.488229499477823 8.767246052468261 Si 3.466378497863661 5.284411439144335 8.764663100359922 C 7.018387713377279 3.506574369789762 7.039216821931506 Si 8.747307506475540 5.275658902437111 7.014538323569776 C 8.817923542296244 3.560354705696127 8.799839088838581 Si 7.028064218520120 5.260991933262132 8.826987321451295 Si 10.567213099888413 3.496735489313128 6.993690206696273 Si 12.277960476014909 5.308702905125218 7.067234680221762 Si 12.311714878770379 3.489794294760095 8.789306893269211 C 10.562883678628209 5.265375479941428 8.816614080600795 C 14.056083357505466 3.516294053463961 7.013660224936218 Si 15.792898855035361 5.271491566833967 7.014582696070945 C 15.826805956281127 3.525984309003716 8.748045937257277 Si 14.069104385677869 5.283100633195301 8.766225599115918 Si 0.031665952141841 7.033836546931947 7.028649015911153 Si 1.740867828411105 8.783088097216892 7.019053579679412 C 1.778474751104041 7.041823866867539 8.804959611476839 C 0.015132844166171 8.794803703951345 8.794714390804726 Si 3.482198746145933 7.032859447409971 7.068437856171799 Si 5.300408229777634 8.773355782377243 7.065462479494818 Si 5.272189686851858 6.995531994066003 8.787208999940678 Si 3.506336468877689 8.797648013056095 8.788301844674372 Si 7.017170784064395 6.989537644813332 7.044602854763868 C 8.825331485975251 8.786888609402537 6.991378965193976 C 8.789421767272753 7.097888863776095 8.778789784066383 Si 7.019596417675411 8.760232326831403 8.809426136586177 Si 10.558125324284905 7.030735817785916 7.043620144094178 C 12.349854509801959 8.823439457579278 7.058365280658087 C 12.283323709307117 7.003712472996709 8.805202874463808 C 10.584835326523470 8.783313119768883 8.793412571480237 Si 14.033298020325631 7.054616551529453 7.045324905117072 C 15.798579601176227 8.803333976196265 7.094815596848275 C 15.826143730356227 7.100323496259302 8.802801065684100 C 14.082892774987796 8.791420428313165 8.759836498883120 C 0.018789446788488 10.564605775130554 7.046348839397043 C 1.723850996224404 12.334300134625485 7.085167660811766 C 1.740545565618263 10.543283124280265 8.770990804003207 C 0.014455870833188 12.313342084451412 8.782946945036171 C 3.519017378842742 10.531049306607331 6.977115608836796 C 5.281868316583065 12.363550898080391 7.065339484368260 Si 5.250099424051044 10.526826675256739 8.801889771344301 Si 3.546266352214630 12.293927618235568 8.769520230686851 C 7.006245342561736 10.604027194496242 7.066793135800610 Si 8.824459328158841 12.321552018026699 7.014873018522876 C 8.785871494093534 10.605176360004187 8.737171135648882 Si 7.068608367386672 12.318771901223416 8.802300560618892 C 10.517393279165958 10.596466963360756 7.023012301315861 C 12.341881875921031 12.284921447802871 7.002269200898338 Si 12.298808512296956 10.529065412783416 8.772075650379415 Si 10.576814222791613 12.324871682196141 8.810111267815156 Si 14.102863373024865 10.563077594878331 7.014230782844292 Si 15.836409878632466 12.299695215478307 7.030977364760279 Si 15.846553995201631 10.523971236232015 8.736559449159381 C 14.069434688741064 12.313975023863518 8.838739427882215 Si 0.026883438696115 14.123149441691808 7.045504136629404 C 1.739600900761205 15.800038329795523 7.014128451121787 C 1.756383490590280 14.091977432586463 8.785082997552836 C 0.041733197164189 15.824531494984583 8.781625493955675 Si 3.529719542874230 14.056538787761555 7.061808089444355 C 5.301864992108319 15.813464774829166 7.033811616005289 Si 5.307864672920739 14.103548175983439 8.772754088266012 Si 3.522136264290396 15.818744166032753 8.787729326403912 C 7.041561705527172 14.040003766376495 7.088866794746253 C 8.783519595567174 15.849789079974515 7.083240072130914 Si 8.810239571259959 14.083118397226324 8.764142576489233 C 7.010649663299128 15.860001097331795 8.800029044227363 C 10.533806805028632 14.078304946443208 7.031672890571316 Si 12.327257677027061 15.809765602585449 7.026793226588797 Si 12.342194011013298 14.052354450578807 8.770460077645714 Si 10.536611130387657 15.820848165678127 8.799491750138330 Si 14.091954905523952 14.064359589723120 6.993203693730663 C 15.786480340368687 15.823900180570631 7.045296301813551 Si 15.800132047062561 14.056074901480059 8.790531695737005 C 14.059998487652598 15.833417593143746 8.793536116342262 Si 0.053752099959981 0.005016508137522 10.549751864965350 Si 1.760552398203760 1.791805797578553 10.535854058355708 C 1.721504870487571 0.015895355706502 12.273963758649854 C 0.016619220926039 1.766309687222293 12.338533699062264 C 3.530006691073126 0.019076724141803 10.567454667609098 C 5.273953196197803 1.752549781594237 10.499629589894850 C 5.294129673050445 0.027758850635432 12.308574192198792 Si 3.498280078704906 1.732020029425895 12.280167179674550 C 7.039341462130410 0.000332783043845 10.587479564656485 Si 8.786669778605514 1.766019158659816 10.547399215845298 Si 8.760325087811591 0.002942813576993 12.301369306946325 Si 7.065448872954093 1.741021360522371 12.315458293431238 C 10.573904645384969 0.023148488604605 10.501650172176761 Si 12.335948086248363 1.782146750606450 10.539267497400218 Si 12.294959590501135 0.048677018482293 12.291096207109680 C 10.541158013877194 1.802787533571009 12.298895121815258 C 14.076873749435434 0.022532373311683 10.569149590513236 Si 15.831310885380939 1.805423223147221 10.576290144949093 Si 15.810650251423361 0.004688647623321 12.318128754856099 C 14.060510722226907 1.769020465055881 12.285752390210520 Si 0.029453231905255 3.518826791444893 10.556986776836045 Si 1.810507704791606 5.296593163247488 10.573234584229727 Si 1.737133573748723 3.503638434428105 12.350008348453260 Si 0.001083175383734 5.308885972981867 12.339602097642073 C 3.495782553969546 3.538941858928726 10.596606514769613 C 5.317404202322224 5.281327255932759 10.529604181488759 C 5.308173396754361 3.529811114156861 12.330355323945819 Si 3.551309495243464 5.248666890758855 12.340353936820236 C 7.037011124404748 3.477294142510589 10.527478087717435 C 8.753873473005278 5.238535010820152 10.527349586721751 C 8.814398469914185 3.510989858176759 12.310264525331396 C 7.027145617869397 5.257490946273809 12.339293014358560 Si 10.553312493387464 3.511514931192551 10.552247776959891 Si 12.277404395249295 5.270198936594203 10.572952875082413 C 12.264903227356296 3.506490760426588 12.340892618543160 Si 10.580006808537009 5.280559455576920 12.306615586422568 C 14.061024558951940 3.487202256208532 10.518064598517153 Si 15.850311018120287 5.303869313854217 10.576059641409607 Si 15.847317370740445 3.503686073152066 12.285396831753538 Si 14.058810412090539 5.249487634684149 12.340640764477925 Si 0.016050840360800 7.077403592767229 10.551823454045225 Si 1.782941714504813 8.769800489442281 10.555568807442556 C 1.778363636820731 7.078271685284776 12.317150637017354 Si 0.016946181444626 8.766766651218488 12.300081265325154 Si 3.523864176005822 7.037645308191301 10.546157519778154 C 5.283060195322316 8.804469501888205 10.564732902567172 Si 5.245204789048505 7.001327425786365 12.319408532063697 Si 3.571055328851104 8.787838656185871 12.341183388183254 C 7.059018569449718 7.017749269852687 10.576693167698732 C 8.841158163563959 8.767396839688844 10.540397615864249 Si 8.815847824814382 7.040704630921913 12.278100916153903 C 7.053629397289034 8.769972607314045 12.304259166904760 Si 10.566922674035801 7.054152869539976 10.566632744284300 C 12.307368688000039 8.797116392400218 10.544246747763564 Si 12.292219873844552 7.013453217725925 12.302051922007854 Si 10.581912090332562 8.758424263940572 12.277938460734129 C 14.048274634412198 6.992575718158213 10.545971339038433 C 15.859618900035704 8.835015606080285 10.590289848132326 Si 15.849130343303116 7.025468899971140 12.306522305431509 Si 14.109849405690845 8.795737695717857 12.341183852125059 C 0.014469555251146 10.551793948822855 10.553170412568814 Si 1.772848808477851 12.336641192701798 10.533743817344229 Si 1.797794103772910 10.553283756011401 12.326507644038180 Si 0.033271415539737 12.308631115925373 12.320658492331447 C 3.511697676981560 10.559995368279024 10.599703936634420 C 5.243476681742767 12.302635644657222 10.584422379132995 C 5.291738565573047 10.557435663604210 12.290540842659937 C 3.471771652747522 12.296385802879360 12.293270471254919 C 7.072589974795726 10.547894265706844 10.567407332343606 C 8.775650392797486 12.317819502301328 10.541010009403340 C 8.821124781835040 10.556651536187104 12.256367524527898 C 7.044147934765286 12.293474454948448 12.285818880576659 Si 10.538220276941693 10.525011102333902 10.524229787794592 C 12.362951286494214 12.287362445820824 10.524864764552786 Si 12.378056560296741 10.522620303370193 12.283042651103951 Si 10.578639884295258 12.277327791532928 12.250721900522398 Si 14.082647921221469 10.562102358614300 10.528286907919002 Si 15.846319246827099 12.318474059779804 10.557270786166397 Si 15.850560403806560 10.557028180530878 12.335574263230180 C 14.081078168238887 12.290086784819792 12.264636248667259 C 0.005018048408442 14.058338344101665 10.516365845696226 Si 1.787655145329564 15.837007382265686 10.600822469315430 C 1.769300344392384 14.103668107176741 12.291588845089601 Si 0.042087969438993 15.825269478745168 12.299269228370305 C 3.526033544621768 14.091591543623524 10.516849259346079 C 5.264648040960935 15.814462798954406 10.577549319699076 C 5.280402526119091 14.097760482690388 12.310680934050296 C 3.502906377712800 15.856542395623778 12.327709679797847 Si 7.065135381632304 14.062832684993607 10.536006661646121 C 8.860559175843688 15.823541771476313 10.564096072458682 Si 8.775681437933175 14.058042581145381 12.281345588478231 Si 7.043178234481767 15.843728837761027 12.261298924573490 Si 10.582615476846357 14.041468518943683 10.578733474739513 Si 12.314870755239490 15.859296094392620 10.582484615001350 C 12.303499398819255 14.058906764704778 12.302894060738462 Si 10.533707325820357 15.793476813194653 12.324806017841276 C 14.018579253815005 14.067706633036851 10.571451981690467 C 15.852387549040994 15.816004027142824 10.561992285649865 C 15.795459774954223 14.124893921238208 12.366990114381586 Si 14.067491305414471 15.810416423617431 12.306704864628561 Si 0.004487420733096 0.016077649021194 14.039110445151065 Si 1.763728321273855 1.739841612746149 14.100365570272210 Si 1.781523386254948 0.007042690890210 15.834374383087871 C 0.043024219862274 1.748271223128240 15.821768038267633 Si 3.529021494326453 0.014726974335566 14.103089165310013 Si 5.272640496766180 1.723449818380497 14.067081775124063 Si 5.265890299271557 0.009581706551394 15.831879739643579 Si 3.533996464320924 1.786774475750781 15.851476093767095 C 7.083518281022924 0.016319011573598 14.071063379211969 C 8.818483046366589 1.767255646897294 14.117012371855280 C 8.789234879000768 0.029900868345543 15.794953917037015 C 7.028358738949712 1.741078654044581 15.824372233881595 Si 10.518979246025676 0.041097764959763 14.086482270505662 C 12.342976903704917 1.778726874403975 14.077835639115774 Si 12.323267953815245 0.013555293618860 15.792334995834802 Si 10.530926247733348 1.741919341099897 15.835897070535744 Si 14.061363558241521 0.019820188024573 14.050713394023132 Si 15.831358507702827 1.706898381632744 14.033487418078460 C 15.766950749209068 0.010726647443524 15.793837809229935 C 14.064999536770834 1.786404109147415 15.799866471050182 C 0.014627207374860 3.549998385957415 14.062307727688861 Si 1.735390179744648 5.291829479643987 14.053816716462917 C 1.751808440272423 3.516819018581442 15.831804606369714 C 0.019918682826039 5.259882884738708 15.840815258887504 Si 3.486953318466014 3.483575567455989 14.042771663340439 Si 5.245804605468900 5.301990745642787 14.038630793615479 Si 5.257241138424549 3.538289169068174 15.859581809925716 C 3.515694676249877 5.249374533597639 15.839972486348447 C 7.035248185109514 3.516912005638679 14.035362407517338 C 8.780245665352938 5.281209741864847 14.011797739064884 C 8.821649698176447 3.496787025318636 15.818800558433750 C 7.046425216769545 5.269621277183389 15.822945101336094 C 10.574516259202992 3.544397334890841 14.087116816652918 Si 12.281404332371794 5.247505699852520 14.045295905354594 C 12.273243585424483 3.486840179959787 15.857946915413333 Si 10.540340843554054 5.235123197821035 15.794527878937389 Si 14.046671929898785 3.491705848010259 14.082114114629055 Si 15.858801371027177 5.268160489544458 14.050844419307843 C 15.859730754992063 3.546355603451906 15.851170938299070 Si 14.070878625895118 5.280160925036596 15.823547074850614 C 0.031660683222378 6.994276374371265 14.068549479831207 C 1.750879877886782 8.809626681772995 14.089806804729962 Si 1.782582654513011 7.027038324554391 15.850594685242932 Si 0.000493358440326 8.826783335514952 15.797443207268813 C 3.521514864941760 7.036233065650785 14.052056043260391 Si 5.245105196161962 8.823838760638731 14.035861668237683 Si 5.298147065544796 7.035489658639381 15.813294475698774 C 3.518187566056593 8.802439739673524 15.832887424276043 C 7.009035905752323 7.011589827520312 14.068159668497403 C 8.789231907350540 8.767746074492596 14.079653332098209 C 8.760303070343092 7.069289781603678 15.840195357694373 C 7.009687945630125 8.788539461093855 15.818556522183568 C 10.590592871898989 7.012920491556661 14.022937998428764 Si 12.327971072222969 8.758770205291688 14.070610292756937 C 12.368387326719223 7.028373352512663 15.848322952407193 Si 10.567421318169471 8.809216821292335 15.795082517509849 Si 14.055401326627576 7.043166872133122 14.065300542605506 Si 15.817969965439982 8.776950376523786 14.125912402316846 Si 15.835418230339078 7.077709720862562 15.792346337432209 Si 14.085818382874573 8.808297961406558 15.847473167684177 C 0.013678991619279 10.542661048436486 14.082674762079634 C 1.779882043320463 12.317867350498961 14.036747814360140 C 1.738107426881625 10.521965276058689 15.832559128984174 C 0.003440296108421 12.373182334378052 15.838069081494536 Si 3.551612356009743 10.533041008943687 14.064249079130024 Si 5.252964885385562 12.298703408770812 14.094362133623415 Si 5.254939579839495 10.516502714469638 15.834848113870386 Si 3.518385623096987 12.289590111509728 15.796532792342010 C 6.982629438190069 10.589740052384167 14.070329779533813 Si 8.817244499744609 12.317205876593240 14.056060894575140 Si 8.787382370493326 10.555385819628288 15.805371319107824 C 7.014750955575129 12.291385084512884 15.769352636886088 C 10.593796670118246 10.553278120449541 14.055617106757415 C 12.344043538348144 12.273821906218283 14.102583903757363 C 12.290715379053070 10.575314756979049 15.840284719666389 Si 10.537148653398241 12.309929492863562 15.835956055073543 C 14.086685978448973 10.546804939492597 14.092818539982281 Si 15.832368160673319 12.269204772315431 14.085509627393719 C 15.813220887550045 10.569145447113041 15.828907709410105 C 14.096412309079824 12.327627519890973 15.834803038364226 C 0.025483755987004 14.087508273649144 14.058913372305003 C 1.722800273826671 15.840726243647381 14.027307525304664 Si 1.746500825941306 14.041538811041145 15.787537105393461 C 0.004870512569233 15.855986667846409 15.833268520508982 Si 3.501566238031187 14.090021406453749 14.088383567751370 C 5.299081557690847 15.816795574307081 14.043967004466149 Si 5.290747922649123 14.067692607840469 15.829880606121083 Si 3.560509382622091 15.844749311918106 15.842565233900554 C 7.006386216915365 14.065444247609975 14.019096923191293 Si 8.798419063806033 15.859588329529792 14.034136937668569 C 8.765989469950984 14.082995837195057 15.828693051512101 C 7.102943753847057 15.813698414562936 15.818800480262420 Si 10.561864676859946 14.056921330052424 14.067925888682414 Si 12.315067236432665 15.858914514492083 14.038667089723631 C 12.251839524236061 14.078223302901984 15.793288613704869 C 10.544242358281938 15.805819250633624 15.818202705788359 Si 14.079880794287712 14.073633957412429 14.050481271202354 C 15.860366209886985 15.836878612810466 14.067621106999852 C 15.809045525146946 14.004163870792938 15.849993137720430 C 14.106036624113823 15.802668006941888 15.843615722701331