500 C 0.002364584783100 0.021516752252216 0.006180190399210 C 1.636537351393646 1.652203370099017 0.021614131691982 Si 1.625888484048114 0.004115807352034 1.682179530913265 C 0.027817742550124 1.656777501328503 1.638604732516703 Si 3.332671046577072 0.006459414319031 0.001058890191037 C 4.981714080481959 1.653148695260766 0.016173084988529 C 4.982593554500243 0.022400650023768 1.646880234099922 C 3.328813241777075 1.662952759202129 1.681450555057366 C 6.645005561640356 0.030012248011627 0.002414122894513 C 8.307404838304919 1.680574126604356 0.021438888830998 C 8.306767682500528 0.004645966380006 1.683730081391053 Si 6.624355514755561 1.659994018482752 1.640770265034935 Si 9.931594425610918 0.028238777299672 0.017662450823888 Si 11.574059005345655 1.681646583806606 0.020004444367525 C 11.583385129811589 0.045488729295208 1.683922224282956 C 9.911568556747790 1.641679755152159 1.683088897312566 Si 13.230822847957221 0.042099311185808 0.022863247330699 Si 14.893402759786373 1.659305983972509 0.044989597702505 Si 14.924867212900676 0.010420083324760 1.639001167081614 C 13.235397678216954 1.680939459056582 1.678436066006678 Si 0.018965316624058 3.308874703528320 0.018966191682707 C 1.614491249216296 4.985650282103538 0.023855694058059 Si 1.688696866426027 3.346763036654316 1.670217039266209 C 0.041736647932792 4.999286168270959 1.660324789067086 Si 3.321146341547986 3.281535978956544 0.013601980443342 Si 4.966461455249554 4.948014729167996 0.003359063486475 C 4.984235684713674 3.308942292656071 1.677762698019104 Si 3.331889136268277 4.980233972975034 1.655529268240980 C 6.659271012511786 3.316153218730371 0.024274552628915 C 8.342984482332978 4.938248147728800 0.020442660580951 Si 8.282175574018909 3.275228146646758 1.670561875913189 C 6.652070170613438 4.964415589819763 1.681038439735034 C 9.950213597624490 3.330433632429213 0.039820457998706 C 11.597761955657210 4.951909991918031 0.036107512256442 Si 11.593613680285403 3.322714921281312 1.633602301607994 Si 9.930719406550150 5.022953675522192 1.655626220785126 C 13.279600463274718 3.287373863564951 0.022685400420796 C 14.927184570792660 4.965375991785925 0.005634549585800 Si 14.898679583818602 3.306705433035704 1.642556635146802 C 13.260209950075579 4.974139537622921 1.642912075023465 C 0.001981643129447 6.606944177743085 0.027064523624952 C 1.645702534500667 8.280448913763369 0.031428346308432 C 1.666713322084339 6.596102311610284 1.673070178842830 Si 0.019184339610891 8.250844168428422 1.635057467730988 C 3.335778714599186 6.627853614669323 0.025812612871856 C 4.989598717040193 8.288084584747233 0.019377301280442 C 4.939034645427377 6.628993426075110 1.684883519506932 Si 3.295096107943199 8.275156253743470 1.670759969092413 C 6.614492013913708 6.595618175114004 0.047360333378403 Si 8.287399091013953 8.274112432892274 0.031949514995308 Si 8.249707300712739 6.612060942193243 1.645929005858441 Si 6.616010331022127 8.301625965745830 1.689439106059462 Si 9.957932001817944 6.613070953918633 0.031263713797350 Si 11.623496240820671 8.282640821652091 0.032444503103804 C 11.565128453516976 6.608647390587202 1.625271307364147 C 9.963936019291173 8.301431184443837 1.630031884069712 C 13.259681173619647 6.617867143632020 0.026266023990209 C 14.884431211722941 8.238169107297383 0.021049852825936 Si 14.937921618062138 6.639084912180711 1.683160707221234 Si 13.233666283916010 8.279273747326224 1.631099371267798 C 0.010209041396418 9.973261903337511 0.006155611857926 Si 1.670569251238918 11.598403637671636 0.006032649014064 C 1.681848766564596 9.915554987355275 1.660227445486657 Si 0.000514687788199 11.630116824592985 1.650851402873952 C 3.344835067664773 9.944782191413429 0.032171243406587 C 4.996448724818450 11.574964914462967 0.000389881397284 Si 4.952806360162588 9.882830396900495 1.675059309447798 Si 3.312277358180374 11.564756923512492 1.647172869451248 C 6.598335835311902 9.914199201101717 0.004214643996383 C 8.275894973185325 11.596051200228432 0.052790101368367 C 8.285883644480290 9.943787406670625 1.645178732245607 C 6.600608063937046 11.627743424620206 1.652690879705935 C 9.924032871571136 9.933000480994561 0.028574337612277 C 11.597966297524106 11.578664180323301 0.016091434861211 Si 11.577060060888392 9.988215711140374 1.636045377679148 Si 9.934637087018080 11.600116069042496 1.683283440066891 Si 13.248898517382939 9.971299583284917 0.030606754156195 C 14.939605440476107 11.589365220812121 0.051408175011453 C 14.909986436336956 9.948857694679203 1.687228152990890 Si 13.245731876276166 11.604412301789695 1.612218992434982 Si 0.029495215535820 13.232652044283299 0.007697626752132 C 1.658252987094717 14.908052612257137 0.015878896127114 C 1.689935538231218 13.285950528757668 1.655799127340058 Si 0.016025992976723 14.892952675048903 1.627789807415861 Si 3.299186849845101 13.289629915203395 0.022056464539747 Si 4.992622804371488 14.899653878886634 0.018612951192332 Si 4.935525105150375 13.254864198405373 1.665216666472235 Si 3.286870466536209 14.901705695450577 1.708751430606170 Si 6.613931204938988 13.266989028304069 0.020876617386860 Si 8.274620052180767 14.914416693426999 0.009754792999468 Si 8.259675710600579 13.266186947141888 1.676343620896243 Si 6.659013890826273 14.904651347473678 1.660564883819508 Si 9.962729360480958 13.262373010349821 0.028931376198396 Si 11.580890102386549 14.906544719858539 0.015015917896241 C 11.633720534616684 13.279140087195840 1.669068006797260 Si 9.953659610382980 14.921784201882428 1.637559522450855 Si 13.269476001014770 13.251723456062141 0.001471373453434 C 14.899986727504054 14.935016602150890 0.017329105546252 C 14.942807721215207 13.286321942275087 1.627836880064621 Si 13.271933311246395 14.911839774337411 1.627227009991312 C 0.013089931896013 0.010168349968974 3.335330948498554 C 1.606296633296500 1.649159546864528 3.330089011097196 C 1.643615281563388 0.031242231171751 4.972978218328277 Si 0.013476600350880 1.677086749210964 4.969438351356501 Si 3.298772592227269 0.003802743069344 3.357499710321162 C 4.987518430544856 1.683848064854233 3.283897600725878 C 4.967089186937200 0.030238715867492 4.984473285911278 Si 3.268953809311081 1.659518664107605 4.985120984926452 C 6.613850010042080 0.008680407146829 3.322489258176537 C 8.254301918903467 1.634829918842334 3.332457851450388 C 8.275841443171840 0.040173267573365 4.992029611437682 Si 6.616881314447223 1.669046481250976 4.965813834075259 Si 9.969718677027354 0.018489092553473 3.300874801737450 Si 11.599641211100600 1.652936101151922 3.321302706023857 Si 11.601164597857355 0.015999741151606 4.950581086279096 C 9.912594150022892 1.642566146920469 4.983384145714299 Si 13.230203173113313 0.034084283410477 3.306473323253427 C 14.865198735079769 1.642777042530686 3.343300032612014 C 14.882962740867155 0.002539397351758 4.968708061094524 Si 13.247665412196518 1.599535088659664 4.926191351283633 Si 0.031358169336513 3.305987596160514 3.338228005209544 Si 1.615489681170031 4.951190189272726 3.328035631588409 C 1.640271739626362 3.326205543300283 4.954151459936358 Si 0.004474759679200 4.979185976400556 4.938317495534068 Si 3.320675368522796 3.320476851866249 3.309514061800948 C 4.957992325559737 4.943094036621146 3.297524722368774 C 5.001173085985711 3.291636711932937 4.986910689958174 C 3.309992101685295 5.034550079398389 4.939498568337135 C 6.639174837816777 3.340994219831727 3.300690299844506 Si 8.267001772608218 4.951989149394520 3.328313917216650 C 8.307005538657146 3.282459825748045 4.980361171076522 C 6.599466209438352 4.934012926124105 5.033549961775991 Si 10.000256552337969 3.296339569110432 3.358846376389021 Si 11.616534444224795 4.979505213998816 3.333241050501801 Si 11.559044821692819 3.315682192830996 4.944066143207702 Si 9.968271136805258 5.025561203458092 4.970372927064630 C 13.279222906090602 3.317710993608096 3.301645984355775 Si 14.931229827818706 4.954829616060539 3.310853815234231 Si 14.882934993026259 3.326305644524281 4.971204520881433 C 13.276420881848201 4.998188359758841 4.947874547941223 C 0.041480398481795 6.620518517864167 3.334700123344839 Si 1.652956587759930 8.273774712184187 3.297269571541837 Si 1.688183595789410 6.616824694416705 5.000074759234158 C 0.022107672082225 8.318161493165540 4.931287742082525 C 3.377536352279260 6.645713810571862 3.364069136466074 C 4.933748832825495 8.250410714600800 3.286539280908833 Si 5.009044110809342 6.609851005986678 4.985583678330282 Si 3.339279527772973 8.294402464645096 4.989752553010448 Si 6.628344716562620 6.610425987028289 3.302101014744026 Si 8.259670394577716 8.265341053092245 3.350711603571221 C 8.290529746787529 6.604467234050196 4.941163999298505 C 6.617940593016925 8.296821223266894 4.999518268993819 Si 10.001279424863371 6.592010700288435 3.322375670607769 Si 11.599702607354001 8.301154603197521 3.363736701044332 Si 11.587269373513330 6.627259972684885 4.971215608103869 Si 9.979110642030703 8.283909100902836 5.009545805213439 Si 13.277132286332003 6.608116371030174 3.313000674535000 Si 14.933851403147278 8.270808243500660 3.301156680215864 Si 14.928808391478013 6.624505735848956 4.965303017150497 C 13.288040058840348 8.296047012172187 4.988410312472507 C 0.025174699874053 9.876278629364254 3.290488690844300 Si 1.630346270832926 11.604621306420007 3.310069554951178 C 1.658555192287027 9.940947072771314 5.005101962862653 Si 0.033059096069808 11.594476240258484 4.984146684549598 C 3.334238375868781 9.963702476890274 3.318964524572815 Si 4.974781114894482 11.602735531665767 3.304481378571199 Si 4.915467334726366 9.934520989141648 4.931319140956286 Si 3.326362815676562 11.608376217794751 4.959449758557616 C 6.643201716572091 9.946274204432314 3.346847119325647 C 8.280828651784002 11.638176398851897 3.320479731650060 C 8.291283905268457 9.933024917371553 4.970853378718238 Si 6.601277939713607 11.618979792669382 5.008040860448012 C 9.917052690026976 9.953328567376365 3.317604812516395 Si 11.541438751235299 11.618386793264197 3.296510812769350 C 11.632292383575027 9.970994167262086 4.959074533801330 Si 9.923113918962850 11.625364887123705 4.982783315949582 Si 13.299788903856820 9.938252177342617 3.328023691246495 Si 14.937345583076793 11.573264739239336 3.344364327926031 Si 14.928508942319507 9.960395455797158 4.988383330003521 C 13.285948309648164 11.563115755381792 5.016967017487666 Si 0.013222307288251 13.276775175956935 3.308393933042702 C 1.640311779544033 14.923956053894353 3.310310402555168 Si 1.630896123939416 13.234847775987754 5.015568952944651 Si 0.001293486396606 14.929084296471004 4.965174442700404 Si 3.323011997108579 13.219761312009906 3.343156581585319 Si 4.960770930841662 14.928334896081019 3.315606902615268 Si 4.951753142387784 13.297218424267372 4.972425785517890 Si 3.284884192340863 14.915034022013563 4.958642821497492 C 6.645002531624614 13.226802632566386 3.309382001270551 Si 8.338559126540734 14.898590105769369 3.336831560110616 Si 8.336482331600676 13.255868800981954 4.951666365622162 C 6.625821820713089 14.903981487413120 4.907645686904570 C 9.940219494285454 13.266394648063864 3.316514404559843 C 11.584850545076904 14.907467654524000 3.288196857606577 C 11.626244383689459 13.254490460920799 4.953491681677518 C 9.959011683912783 14.924729357879304 4.994302958659127 C 13.242321122878828 13.223414656186248 3.284162309241014 Si 14.937067555554806 14.902671654249914 3.297327187139956 Si 14.935747264988615 13.245079799497578 4.987843944896018 Si 13.230616149143355 14.935731649767927 4.972918835142808 Si 0.024850013082232 0.027613097135496 6.620371928631710 C 1.651573188869054 1.647994555484457 6.645843471611197 C 1.630204889529640 0.033117600517352 8.302533077796088 C 0.018471314286436 1.625000374850157 8.312472445209380 C 3.262192808459704 0.030269104456362 6.666492290810957 Si 4.965468050740025 1.619697131486584 6.625191851984648 Si 4.919916576118190 0.023846946312325 8.267308467571638 Si 3.335262557426776 1.662982792263534 8.321051429494355 Si 6.628578517664855 0.022432773632887 6.639330805957523 C 8.278981310327936 1.667254706551715 6.602396104726306 C 8.285241649082728 0.001855315070447 8.314627790187199 C 6.639629927566330 1.677592864230775 8.257582590424304 Si 9.938844531822102 0.016388231024485 6.611574846201273 Si 11.622695654258074 1.654493629441335 6.584023983595763 Si 11.571431180995924 0.006078683429694 8.257251865136595 Si 9.927450298601357 1.647620190793057 8.287879270336841 C 13.202069279435840 0.005435475667893 6.609310606937362 Si 14.930102633854087 1.667815358267289 6.614563649306160 C 14.902313125687503 0.001141221930790 8.298021003727770 C 13.224530453187914 1.667882734568653 8.291811315535710 Si 0.032384817387540 3.293351534073054 6.606660463513033 Si 1.661335838134511 4.949693844394291 6.646961675460947 Si 1.664181332539665 3.319454656430573 8.290196581985606 C 0.035972112475514 4.948891542373966 8.296545123470823 Si 3.304897800385874 3.365800684398876 6.615275435225476 C 4.952709693051379 4.974921620248589 6.614043925748948 Si 4.958802766340155 3.299927634842520 8.280318236264050 Si 3.292541093252348 4.969396249949356 8.286092073048662 Si 6.605764158087433 3.303545136732978 6.613304309466442 Si 8.302039584483479 4.954036072379378 6.607740662211062 Si 8.252489456338806 3.336844337274849 8.267988533654199 C 6.627352143896334 4.959971191481872 8.255427694414180 Si 9.944954073962714 3.324584080283269 6.654837729806703 C 11.587787537084342 4.986322547612066 6.642249301774742 Si 11.542073029141902 3.292316782815667 8.316137908185224 Si 9.926262818395184 4.999075891055315 8.283216912872987 Si 13.256513507306478 3.361555188838236 6.620616792531741 C 14.932263507897941 4.951006554245890 6.599112953950229 Si 14.900943946888104 3.285644779637789 8.303035647697001 C 13.284615201835781 4.963353141172012 8.267306148151690 C 0.015675490108434 6.611900991090819 6.596295017940972 C 1.631683217079033 8.300010370668147 6.650023790633761 Si 1.675575453741834 6.651067581906965 8.309840616578345 Si 0.025008899310109 8.275844158914319 8.306132121879514 C 3.311241844728587 6.618395322954881 6.604386203921727 Si 5.023287991849863 8.240746440897869 6.656794911574258 C 4.956962632003783 6.599884795985052 8.308521889123901 Si 3.356422980075452 8.245838118923107 8.300877427345862 Si 6.633888796932588 6.619617652760770 6.644820279842559 C 8.272772824452932 8.280853629497612 6.588937751501711 C 8.298216626799878 6.657912396512806 8.308207399532760 C 6.626411317400570 8.297098186195480 8.313567696369336 Si 9.971913596630214 6.653018385078686 6.613761104458451 C 11.591783223760158 8.281255866880977 6.654989648984018 Si 11.590233039215466 6.613543755341224 8.267754144774496 C 9.956962628910697 8.220119884074640 8.223161938787886 C 13.250084317777318 6.634069705419861 6.599691343109590 C 14.890485661442405 8.243408197880667 6.624230176989538 C 14.911879609581806 6.618213317810664 8.264084330321285 Si 13.251561911435489 8.294281019669169 8.263534925037657 C 0.020530857529590 9.918943744488855 6.618902952061985 Si 1.672974637059713 11.591648297630064 6.627768339099958 C 1.627891229410637 9.918784702674467 8.255828203968221 Si 0.011543674642143 11.596343588612571 8.289689810368687 C 3.320231743386838 9.916809850795770 6.650715347756845 Si 5.007826295003406 11.585305364574452 6.595439872317303 Si 4.998723983005697 9.977417442487118 8.268483908163635 Si 3.295817850411463 11.596479903543507 8.284451422219547 Si 6.649774287419936 9.944939933069694 6.563804006612513 Si 8.294384657698064 11.600137255452038 6.636651424334006 Si 8.278078227988139 9.945529419782016 8.287447588652837 C 6.646202595774710 11.604570556925294 8.262894703031108 Si 9.953996333271494 9.898879282453594 6.654735398121245 Si 11.616268230201468 11.610629982281889 6.620968582451972 C 11.646594564380813 9.965037191122969 8.316977833659942 C 9.903844214304462 11.561299334110794 8.283780810759859 C 13.245502844929121 9.970814647312546 6.612476820297985 Si 14.879327031601793 11.606839231325811 6.609072525230376 C 14.864903897952686 9.889658730699555 8.284407033420978 C 13.215861983324643 11.604168330516352 8.296248107479911 Si 0.023984130055498 13.262320425754401 6.651587982523905 C 1.648934564242188 14.915332012445965 6.613146879414979 C 1.664738875474884 13.240489560212014 8.292095019823261 Si 0.019484029808425 14.943437603746323 8.286426473591868 Si 3.321833111487322 13.211126763818550 6.603600610944564 Si 4.962750997115800 14.933012307419460 6.631554160509504 Si 4.961093678756383 13.268064578385003 8.294330200294853 Si 3.319988035481156 14.881103723087554 8.276924233670593 C 6.609862267685484 13.280324652633391 6.619289988778132 Si 8.285560924258828 14.889342725632106 6.638698942794836 C 8.278873436522028 13.255284243993559 8.271453536784556 Si 6.603058820276539 14.895141332043659 8.278729078891367 C 9.960955598495360 13.260362454212389 6.634169023742905 Si 11.574127500586368 14.892470044428864 6.586886632667742 C 11.592971350837953 13.285791824322875 8.270691794439925 C 9.974681833912511 14.893635316203342 8.285577556696158 Si 13.294787932048621 13.278021396545515 6.622500660164736 Si 14.928086960527290 14.922319159850639 6.618531418339574 C 14.899164402072698 13.226649054042879 8.285054197200928 Si 13.287994586568061 14.916579320690024 8.245675490256476 C 0.036667688351139 0.018102199550578 9.922135812370932 C 1.627024456258309 1.667867416740958 9.963923778239106 C 1.688259361963851 0.014888511930547 11.601183478614869 C 0.047116355997865 1.645187818397201 11.596342047745901 Si 3.319756540589144 0.008289041151997 9.969090644972992 Si 4.953770515378488 1.639499345508089 9.910567008920831 Si 5.009755585366733 0.001194806223392 11.574811971975336 C 3.310616206625279 1.689099615800564 11.593090489837442 Si 6.633905656602613 0.013831083620327 9.922590480414270 C 8.260104155802198 1.638610151364339 9.922654167614887 Si 8.259802461694122 0.005156641501892 11.625197531587498 Si 6.661505404968822 1.651106381970702 11.629069606672866 Si 9.913609677335529 0.010346803357400 9.952691808330016 C 11.578597791448496 1.656791221808580 9.885767705040108 C 11.614677987217492 0.043286499684137 11.611616517274468 C 9.953705984021433 1.640004985320738 11.551694374016183 C 13.287459934865050 0.012360295772112 9.922094498629592 C 14.916935368903600 1.629550327090952 9.913138641744487 C 14.893167862289978 0.001913621453952 11.625844775218994 Si 13.299694384747744 1.654040294240100 11.597853952549643 C 0.045341779993185 3.297492333218725 9.988685039114788 C 1.663264587238810 4.991158343745921 9.923349524323681 C 1.670402564732075 3.339622125574688 11.613842205662081 C 0.002587061298693 4.996612268879284 11.596439844760026 C 3.319231998811903 3.320763174383339 9.924150664909948 Si 4.960853246783564 4.997295347947877 9.938346904591798 C 5.001766253454173 3.340293881691157 11.573016546211509 Si 3.281590110340230 4.929216785714874 11.591806024856458 C 6.616168854617880 3.343124740557908 9.949567588607477 C 8.256828103323459 4.910900392910883 9.919313449314433 Si 8.289723790025596 3.310563373253528 11.581442274422095 C 6.603180521714271 4.963113551809281 11.614755759513848 Si 9.943488312129345 3.348441433015005 9.970403042415059 C 11.590085462837875 4.975623703218990 9.956854856001094 Si 11.586271868163664 3.294704878959501 11.601497314527141 Si 9.938898478911174 4.971858900406899 11.550354077206840 C 13.242485796439800 3.292149505216654 9.968392749803197 Si 14.927050333648573 4.954852761272598 9.917154503201964 Si 14.908970910101582 3.325220703817431 11.596551554121227 Si 13.289378277069567 4.964438952758998 11.552160026715233 C 0.014763092003658 6.608953129256361 9.947178874500240 Si 1.681170374124144 8.301733088968147 9.926840375844520 C 1.681405761427797 6.607857472669034 11.598329655491529 C 0.034493752800842 8.322871476990606 11.630914013300245 Si 3.336719483428885 6.660321491953837 9.941820140059111 C 4.968377996459142 8.277265582674801 9.957292029415552 Si 4.942826541563999 6.625378697848065 11.580447952476938 C 3.303608577509851 8.298476818193405 11.630175441948614 C 6.657879500529599 6.642195117030105 9.917591511237971 C 8.297432038406887 8.252081991347938 9.933904984744958 C 8.255285238123401 6.641991659018558 11.591156667257183 Si 6.645119015598084 8.290416466600949 11.577302415197877 C 9.964703881109585 6.653127209342336 9.948390310665713 Si 11.621093430196897 8.266261986299682 9.966549389987847 Si 11.594611586491983 6.628317434452381 11.589385493070550 C 9.925295967739835 8.252038569997872 11.584685402543272 Si 13.245838341789877 6.640874686872619 9.960911078500823 Si 14.877601539092739 8.266298817168908 9.936190899354743 Si 14.881039480316939 6.613236413526562 11.602134478009594 C 13.252990096114232 8.296598674249386 11.574901613916984 C 0.041515461621350 9.920187050347847 9.953400475116736 C 1.673296244273450 11.567920773913396 9.923112374647555 Si 1.673360848506829 9.939006345644231 11.576746586263177 Si 0.028460026915933 11.628087490743090 11.624364716748081 C 3.327180838025054 9.907676114658027 9.913282213795346 C 4.959445921583604 11.627064904660999 9.972529685846617 C 4.996153692762221 9.943889135742472 11.601234779605543 Si 3.307465742103436 11.606333217278117 11.594861219572641 Si 6.638020805608443 9.941374887009172 9.932531545955834 C 8.270864637492636 11.590416665985396 9.976626494938781 C 8.318807454965754 9.936426003163016 11.573180618431524 C 6.598207121301553 11.556684162387764 11.626621843426355 C 9.983685972860311 9.998867329674509 9.979374969107592 C 11.597484343423986 11.646826880411835 9.984387921281259 Si 11.628814116053181 9.951738115591768 11.567934026183369 C 9.965462824305558 11.555438039945114 11.602958577669279 C 13.273033864588683 9.936851712379166 9.908383797022594 C 14.938538067296012 11.558010682985978 9.939443426260981 Si 14.897634925703612 9.954589023824408 11.626558317900789 Si 13.251034811024642 11.645623601872662 11.585336563650255 Si 0.006084617125613 13.286768190906882 10.001593711225469 C 1.682358417927500 14.899668512690550 9.949430403427941 C 1.640466184645799 13.229686214251217 11.581141708739766 Si 0.016368757822706 14.934883830452463 11.572499130245111 C 3.320437778942587 13.249755517207875 9.943500880590348 C 4.966254160889447 14.896512201936348 9.938278076940115 C 4.950431419241125 13.277693699464489 11.597004652043358 C 3.298901590815624 14.886451788653954 11.606672180692263 C 6.632092222594893 13.237790633508101 9.917028884971378 C 8.314533747426417 14.909627585960303 9.888837401064478 C 8.269186485020738 13.283510257881774 11.606716791542729 C 6.610530544204485 14.911402264436136 11.571126773902389 Si 9.913391436065098 13.270933830768190 9.935338641302474 Si 11.587645361238161 14.906776926002536 9.964731604848918 C 11.596399067776803 13.258950232074470 11.579821474126971 Si 9.973670960255738 14.911245544089111 11.594915251935848 Si 13.240742422369371 13.277377476508594 9.910322100910459 Si 14.891597104716038 14.915237844110457 9.981459334154613 Si 14.937298305872876 13.248074134226538 11.612260498811958 C 13.254480525445981 14.901823697443119 11.606527015158246 C 0.006974688686135 0.057479675429721 13.212129732661149 C 1.664715299584194 1.665583605533987 13.243677228861038 C 1.625592440546306 0.028602772660204 14.939093335583914 C 0.010326593476653 1.673537873877602 14.934706470198224 Si 3.332804102307756 0.032904900046356 13.218373907631140 Si 4.998521635257458 1.684114577846361 13.221717418432595 Si 4.952638234676610 0.017224881515936 14.892563443237323 C 3.293921887768562 1.678866638073451 14.900571547029452 C 6.599626453674083 0.026198771509439 13.247314770009590 Si 8.253550453091611 1.674099954332939 13.285132617455396 C 8.289256311168712 0.012809964268452 14.935710180056221 Si 6.648668732749497 1.601417851721354 14.881619609914813 C 9.921832656954665 0.034338120890627 13.281350366537442 C 11.598384700754513 1.645860917605065 13.268291396377982 C 11.638255134868816 0.037918783797972 14.891084755612832 C 9.944038375440066 1.677314047511898 14.915182551784859 C 13.246609951379895 0.036324057171268 13.280383703415852 C 14.929401842378381 1.627707627420675 13.255827777180322 Si 14.918584749752849 0.020974349618108 14.883699020591489 C 13.240189576383285 1.676122112834091 14.903180468053160 C 0.001375983781359 3.320303364735230 13.234945635732510 Si 1.614244983513646 5.017345685659746 13.241399187496320 Si 1.628556647301989 3.327679006848276 14.915618002856514 Si 0.001160661556176 4.979598639045280 14.909407043410797 Si 3.305640861156926 3.326970429741594 13.259246547809598 C 4.943031660715534 5.002195444121990 13.222732163783888 C 4.966173542587835 3.366165639257750 14.920249812215852 Si 3.344830477665133 4.940469546420331 14.880780280991763 C 6.620888144031494 3.310970422883884 13.222961049367662 C 8.273782086823918 4.987713403841379 13.283733451539566 Si 8.288493987185349 3.284075969015161 14.909746545599019 C 6.652798492122689 4.961647351980724 14.910366043750507 C 9.950391071279848 3.340353143684106 13.254683932832624 Si 11.658526480280715 4.959855117840654 13.244465911099509 Si 11.550666999363090 3.294828451651091 14.905266340923003 Si 9.951672623037650 5.009578483575480 14.912867289757067 Si 13.219203119311890 3.320901715580463 13.235973223910081 C 14.881278877044860 4.985289284470707 13.262792584603719 Si 14.900542194607812 3.358656079942292 14.927741938813922 C 13.264248256431488 4.981203351343887 14.926194594795527 Si 0.004592492280923 6.647334734110960 13.228444276652988 C 1.629829603281587 8.276927479098330 13.253726872667112 C 1.663676283209151 6.616163355234816 14.902658475894986 Si 0.030947057300790 8.295321234321325 14.937471447001395 Si 3.337333185400247 6.614915873221151 13.245464242521482 Si 4.925774863703481 8.288778937146832 13.225567924873607 C 4.982507903336090 6.616497887435124 14.902800220706553 Si 3.328028056665946 8.300094060038631 14.911795114510747 Si 6.654584264143483 6.610285627864722 13.233005013723348 Si 8.330127843787317 8.274158076311542 13.217920992177199 C 8.297117761488744 6.605093380402450 14.929629799274370 C 6.655513004875921 8.254365528681921 14.881499357531800 Si 9.981462092429974 6.637240946587666 13.212255095791569 C 11.604244456890346 8.276989486076211 13.276018699196140 Si 11.599836390722947 6.607532891984852 14.890883920793446 Si 9.904767218870274 8.265118864488034 14.926316699088719 C 13.259574893482190 6.652965229959264 13.280918756051268 Si 14.910997226645918 8.332444412716228 13.245140933525221 Si 14.939875938664827 6.659879961918994 14.932486414259982 C 13.236454516958002 8.272517418384203 14.935813273135114 Si 0.030849515677697 9.946396150352200 13.262869755218306 Si 1.690459941675492 11.611470307303660 13.282667666338527 C 1.647837348180220 9.970423496573405 14.925186527521072 C 0.028702887774952 11.624308342600019 14.909119348498116 C 3.329564707164876 9.914926908305636 13.244132768182668 Si 4.975320458492620 11.627662462791648 13.270987050987783 Si 4.980521826836767 9.919266403816245 14.890033788058364 C 3.288782104586000 11.589138452976158 14.912084048139427 C 6.647336056864390 9.927392710852619 13.248925645308637 Si 8.312540813286388 11.623287841001197 13.242524781297648 Si 8.269648050932947 9.920915316496396 14.941407980367833 C 6.613177486235509 11.611420045766536 14.936013300338885 C 9.958592832392741 9.970822893995853 13.278099732288631 C 11.554050790081869 11.618512064931222 13.283979818867138 Si 11.584220487821367 9.957786241153263 14.917212868194120 C 9.962315130228998 11.566340874187627 14.911475045610912 Si 13.255464735929065 9.940051056194893 13.226321822864092 C 14.883690987659847 11.587004838827601 13.309514716527620 C 14.944753276681515 9.980914018222231 14.889533454459848 Si 13.286771945643661 11.546946839128168 14.914859531394807 C 0.005286251694506 13.238674704258827 13.261365632260093 C 1.677524264866315 14.916453689871499 13.278963093332750 Si 1.647403677132217 13.237799726771909 14.923424170628207 C 0.024498825415206 14.893151902306020 14.912255906729646 Si 3.344917549201279 13.255955350153208 13.288010160174910 C 4.959802532211670 14.892437322143207 13.261789712929845 Si 4.961562681299482 13.256421583420227 14.930335017704087 C 3.318732001243680 14.919291737873156 14.916065065915150 Si 6.671234540143900 13.260866267029153 13.286847912456510 Si 8.231335969080865 14.907981425094192 13.264473714380536 C 8.310560952640351 13.277958591561607 14.916752519337930 Si 6.623539015753478 14.891315944440898 14.930435912923235 C 9.966709089817783 13.274572804706823 13.249480223148655 C 11.598102621330440 14.912174990202130 13.251935150419538 Si 11.568925397103399 13.247127178812885 14.937011480048739 Si 9.964620920296651 14.900145464231928 14.926477724253962 Si 13.281160052905149 13.271364167700989 13.286321179519575 Si 14.932785490869961 14.923561212066053 13.255035812485696 C 14.907024201270238 13.236007621438073 14.907897026708575 Si 13.280718792144935 14.881975519333187 14.906209041596519