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11.520307128725225 15.291609506535160 7.654671547637749 Si 13.401654267831578 17.159876712146357 7.623490855227379 Si 13.419085250874204 15.276807560328578 9.565761597436794 Si 11.460684313986404 17.225534721742743 9.577026906472346 Si 15.279983214164309 15.322791751001160 7.622249048362017 Si 17.193340127837242 17.211145372931753 7.682784907463456 Si 17.212765637806541 15.290042940268677 9.612998706378757 Si 15.304646476807074 17.196962857921338 9.509549161032732 Si 0.000489651708169 0.019861979773949 11.447013620991525 Si 1.841094987439633 1.876456298379907 11.440862829378494 Si 1.910118059304708 0.011374470464239 13.367723191162183 Si 0.011688955492926 1.933884124945732 13.357323314880095 Si 3.817910626764114 0.049102149063499 11.489743808573676 Si 5.721187571557011 1.908797352363159 11.471796470127520 Si 5.686617159355916 0.025221718791946 13.394940586420743 Si 3.791600765583275 1.911521968635003 13.393067970969623 Si 7.614977626117119 0.007103774891149 11.434323560415947 Si 9.532926399748133 1.945044507935931 11.469076899392963 Si 9.517055274330714 0.008320599885905 13.391070925191364 Si 7.662215698177786 1.901876637622064 13.385896000195247 Si 11.436146574626678 0.063037461952011 11.407638902716366 Si 13.365304263627236 1.894838236606655 11.455292592421635 Si 13.406710318800016 0.021206933043951 13.406705739750796 Si 11.485897324917923 1.890586479844834 13.411662166781072 Si 15.292886638011469 0.006419541367886 11.436950920426369 Si 17.143737744825820 1.875392675881235 11.447456368191556 Si 17.238340002006446 0.036674724741816 13.317231929751607 Si 15.281608430622258 1.923442647898880 13.399462395175659 Si 0.006847993182770 3.844834668040145 11.499350614485339 Si 1.931716650783239 5.699004947369568 11.463948585744337 Si 1.885633781762081 3.799797079983402 13.418319224393892 Si 0.017101117286719 5.722284231184688 13.403785347337017 Si 3.837264341404673 3.811380192101564 11.464291367182074 Si 5.733993190978719 5.737737137469421 11.446536211661119 Si 5.738422460517980 3.806369494945237 13.385884949818550 Si 3.795831745845186 5.707676989371218 13.403768052625310 Si 7.648062471106944 3.793389794728435 11.465908910628601 Si 9.553888136555875 5.726402317227636 11.453164577605312 Si 9.594345740700136 3.820008848877092 13.375314844684619 Si 7.668267672262139 5.746778297476000 13.393626704497903 Si 11.498935271746561 3.816383596241377 11.459075452739828 Si 13.411236554771541 5.753789732475868 11.496183276635069 Si 13.404105992057069 3.793647768270758 13.415326465767588 Si 11.472716911256454 5.721258225129544 13.384528427453953 Si 15.264245245543075 3.814074766293678 11.456067206582627 Si 17.208740865616281 5.751937865580119 11.499166423992074 Si 17.209471525625041 3.826319194373510 13.343475436870490 Si 15.309246958087183 5.696636253274028 13.369216557928338 Si 0.042769023867565 7.678718484142318 11.435220170226776 Si 1.891101127346549 9.536527950508027 11.495767405914954 Si 1.913668264136372 7.645084569025910 13.353325026180169 Si 0.001002987440628 9.599277578021178 13.437559468146100 Si 3.805970373024316 7.610166239927196 11.437302972844874 Si 5.760551714772427 9.529964398152369 11.461753976930463 Si 5.745770384556281 7.668855466759934 13.372379286639543 Si 3.841643561147097 9.535965244170020 13.353663251699736 Si 7.633271000080553 7.619766652836534 11.448004817943088 Si 9.590789249298071 9.576469675953030 11.510083309862258 Si 9.572717153898505 7.610844545213678 13.364816680895238 Si 7.666126123856891 9.583639779701720 13.385351490683577 Si 11.494833811126581 7.660428044942800 11.447279602000252 Si 13.356925659044066 9.527862348879385 11.505729794512124 Si 13.412241105272347 7.637074877025547 13.376609577518908 Si 11.522142684901487 9.554455109916310 13.407574995825172 Si 15.275038178641712 7.618671859503737 11.445432313030276 Si 17.226327025388802 9.595193833834498 11.510690208992095 Si 17.221995278597731 7.640433287089730 13.333203097849387 Si 15.301598391004200 9.543509440620289 13.400310488367595 Si 0.001088855772721 11.442133537875048 11.482522027085873 Si 1.916933088118389 13.417783860873330 11.470554098592254 Si 1.945214906080994 11.458719328233643 13.387796956833013 Si 0.028348330990287 13.387782173550663 13.317913083739263 Si 3.856305010293592 11.436330151882908 11.499937993834591 Si 5.736807711668310 13.401772213352388 11.512936603828740 Si 5.761783976546874 11.492312092565118 13.403876894027244 Si 3.846608626869626 13.372710351986377 13.344590699921177 Si 7.682399576234274 11.422784023170996 11.485043810460471 Si 9.520367615100161 13.347000904767411 11.485619764442303 Si 9.562473636108228 11.439925601306477 13.358577551971891 Si 7.673671660372607 13.364848334155850 13.375035895262585 Si 11.447841834277412 11.537844169713525 11.463060166137613 Si 13.414848454570205 13.328027606125483 11.443452323661463 Si 13.402035662383522 11.472792651439516 13.421497014757103 Si 11.471119238120030 13.361293113872927 13.374434108249590 Si 15.263867280335598 11.478546687412242 11.502437142073019 Si 17.194343791114932 13.362247755516025 11.478469485946121 Si 17.224457727931433 11.453908887466762 13.363537729384072 Si 15.294126007423181 13.367282926656319 13.366819570699574 Si 0.041461707234151 15.277199695941629 11.522329527377702 Si 1.945604957721740 17.189283249680113 11.519344363301855 Si 1.921078120775097 15.299532481313594 13.363826298161916 Si 0.009378853405632 17.233557772851704 13.359210295745639 Si 3.836606343730959 15.285911103254159 11.449268152936575 Si 5.755350903844632 17.195310410552985 11.443498322701249 Si 5.763756725826711 15.312873483039573 13.365434467917018 Si 3.803888140959132 17.177851066435171 13.433516327965826 Si 7.615882860357233 15.327196242391061 11.488111029076299 Si 9.531422600042520 17.135649900389108 11.479112701186960 Si 9.560828759020687 15.277131065100495 13.364437257702344 Si 7.642176746013856 17.154509479500998 13.347304738783103 Si 11.401018992628700 15.285984467065974 11.476126974222995 Si 13.399018699151824 17.232109185801953 11.484258035274186 Si 13.369961829233272 15.288253170309003 13.351602500416917 Si 11.522338041641774 17.223138930433215 13.357672826886793 Si 15.293478379057124 15.258513553035737 11.485672357562054 Si 17.183473561420122 17.220086107502560 11.446283702399230 Si 17.194980915673383 15.260319432982962 13.393978107715663 Si 15.297441608138202 17.158370543741629 13.407790432578640 Si 0.008570898395009 0.016534465942615 15.287164835380711 Si 1.922979369708579 1.866543322379168 15.281207158647865 Si 1.877051398642236 0.006447495911873 17.173120328372626 Si 0.029996177902455 1.916120849359956 17.219095031801306 Si 3.790877148250344 0.032306306961598 15.321671155608950 Si 5.770548660598276 1.842746863647479 15.268827967944876 Si 5.693792969834977 0.000845093715600 17.175504262250950 Si 3.821803905604934 1.924703492015418 17.220666587840700 Si 7.706876957664829 0.060172921136786 15.324854776146539 Si 9.558185002962832 1.941619230452132 15.296584061573810 Si 9.593596810710343 0.036194000360455 17.210115359909700 Si 7.639899971046141 1.914612790684474 17.224730088634445 Si 11.453647892582046 0.014269413722094 15.287081871106119 Si 13.393934364144394 1.939443348267321 15.265243765892858 Si 13.385589402750853 0.034654964993450 17.203785820366285 Si 11.501403937086426 1.891761170905450 17.174152133057486 Si 15.276619992417595 0.011470155943066 15.288295624721419 Si 17.236299395840625 1.941290211809724 15.290532280820033 Si 17.185036032573894 0.027827324234893 17.195924526421997 Si 15.290764787310922 1.947465130476446 17.205975740097312 Si 0.005054750845819 3.788629084399854 15.294175523654960 Si 1.934338304568749 5.705649973577613 15.326436119030475 Si 1.886280647895250 3.810148971931027 17.194763326346283 Si 0.006763581514719 5.750677640438431 17.214263865288768 Si 3.841038253976892 3.819926141470618 15.287446101773241 Si 5.672189200004877 5.712547818982523 15.256475297458866 Si 5.674685168535563 3.849935710286196 17.217830459950399 Si 3.804729433544915 5.790997641127031 17.189053440204479 Si 7.674379292295938 3.810942793159205 15.318986893326398 Si 9.555363501322789 5.707264538257526 15.279485597594480 Si 9.586689837107572 3.892272829006876 17.177638222372472 Si 7.604903193435847 5.755520897047465 17.213724348687737 Si 11.490294133120306 3.820620416211170 15.292710408304357 Si 13.372832076185603 5.722997064970390 15.261805333773850 Si 13.321790943273925 3.791251776272588 17.224261735119217 Si 11.469529537076978 5.711885884312095 17.189780535835471 Si 15.258071787520631 3.886049438308654 15.257606184505526 Si 17.190703140266056 5.762520072975112 15.254728759769435 Si 17.225397063716201 3.783963623893212 17.233910549365508 Si 15.309544924736239 5.733971128119281 17.221369486722431 Si 0.032429183577685 7.678109882429766 15.273203816257007 Si 1.866989277951934 9.557518896667153 15.321475794982764 Si 1.891181739326621 7.672979065396246 17.217289992662046 Si 0.029589520490052 9.525233642559748 17.229336282884915 Si 3.840460806957324 7.669939295518985 15.276818979343641 Si 5.701593468603473 9.562668893087556 15.268663246004950 Si 5.695210153432603 7.617210546581776 17.209033128432402 Si 3.883571402333704 9.571936561706353 17.170568769458601 Si 7.625213357202872 7.683910830600204 15.317157488146368 Si 9.574933636036597 9.551774389272570 15.328073917720360 Si 9.560348471630940 7.657179009343153 17.168610715438859 Si 7.644882630787174 9.584652190539801 17.219672042078990 Si 11.462011651887757 7.673345350278477 15.315947084204002 Si 13.353787906210011 9.525463185084510 15.267723487763144 Si 13.344695399133245 7.663761935029942 17.236535627039828 Si 11.468517924539235 9.536174987116672 17.182290639179090 Si 15.278950478791565 7.637745972814462 15.322501200084867 Si 17.225002538248461 9.581404254099516 15.260608922589881 Si 17.224842746757993 7.585031648258468 17.228765999736265 Si 15.268417309438311 9.515940499730295 17.236109208050191 Si 0.020564347724951 11.478235453178867 15.305211991631886 Si 1.861145505183767 13.436269682960155 15.332388294993828 Si 1.908426259315517 11.487360626537253 17.205442430408425 Si 0.011603678104512 13.402385120485123 17.191292365832055 Si 3.834092984862414 11.447552308368737 15.303494328292331 Si 5.716608095247942 13.356687797208762 15.324988715744270 Si 5.760088465716144 11.480026918103757 17.228590242174391 Si 3.856634567242003 13.348420638960194 17.166662435174892 Si 7.608851367325771 11.451177432041931 15.262040593859540 Si 9.521529090309219 13.362649440730261 15.316915530905428 Si 9.557830796531222 11.455568696190511 17.196429509327885 Si 7.638323164062727 13.355534034934630 17.211382661578540 Si 11.400994989122564 11.495526896005318 15.296666425977456 Si 13.406588034949765 13.360764942255033 15.268028371143407 Si 13.390503971578751 11.449536374744431 17.232919698909086 Si 11.433619851633491 13.363648288925873 17.217582067209189 Si 15.271043303059926 11.483959263832634 15.277563982838211 Si 17.201356313421872 13.341125056607217 15.315538765270640 Si 17.223694238999755 11.444688160398169 17.198967762305195 Si 15.311653534536728 13.396104171332672 17.183829640836812 Si 0.002199464768840 15.293886558005605 15.276549089263233 Si 1.931013931122096 17.227152617298536 15.286370139426840 Si 1.893438920493199 15.283664345969637 17.230261101374616 Si 0.004021330581457 17.205200458441954 17.171630319510264 Si 3.877801056037520 15.295230691475560 15.273146458500975 Si 5.727648153063260 17.211169478047633 15.298498745643201 Si 5.726090567322451 15.292050398909955 17.189493105358014 Si 3.775836803301010 17.209401416077021 17.180949409690303 Si 7.700610267767589 15.278247690438478 15.280794273529317 Si 9.584206318631837 17.196140670335886 15.269869759895593 Si 9.582845157710697 15.315380720880549 17.239928116075500 Si 7.664593450885056 17.199443879648975 17.211250195958858 Si 11.489555986443071 15.303474147887615 15.330161591446736 Si 13.417118920585338 17.216758129340821 15.299650667825915 Si 13.373569260264496 15.306007665538903 17.199240935338992 Si 11.439168434799763 17.208859467099543 17.224631982392353 Si 15.239508656131639 15.253201791962235 15.293258802663674 Si 17.169656546435260 17.188817859345782 15.297717760077957 Si 17.211857786908947 15.323182865150043 17.219983689040021 Si 15.259098768901348 17.182984715894499 17.198646566374752